1/21/2011	9:24:56 AM	Recipe started at 9:24 AM
1/21/2011	9:24:56 AM	H2 valve closed
1/21/2011	9:24:56 AM	BCl3 valve closed
1/21/2011	9:24:56 AM	PH3 valve closed
1/21/2011	9:24:56 AM	SiCl4 pre valve closed
1/21/2011	9:24:56 AM	SiCl4 post valve closed
1/21/2011	9:24:56 AM	Main Vac valve closed
1/21/2011	9:24:56 AM	Bypass valve closed
1/21/2011	9:24:56 AM	Bubbler valve closed
1/21/2011	9:24:56 AM	Helium valve opened
1/21/2011	9:24:56 AM	Helium MFC set to  500.000000
1/21/2011	9:24:56 AM	H2 MFC set to  0.000000
1/21/2011	9:24:56 AM	BCl3 MFC set to  0.000000
1/21/2011	9:24:56 AM	PHl3 MFC set to  0.000000
1/21/2011	9:24:56 AM	SiCl4 MFC set to  0.000000
1/21/2011	9:24:56 AM	Bypass solenoid MFC set to  0.000000
1/21/2011	9:24:56 AM	Tube furnace set to 0
1/21/2011	9:26:20 AM	H2 valve closed
1/21/2011	9:26:20 AM	BCl3 valve closed
1/21/2011	9:26:20 AM	PH3 valve closed
1/21/2011	9:26:20 AM	SiCl4 pre valve closed
1/21/2011	9:26:20 AM	SiCl4 post valve closed
1/21/2011	9:26:20 AM	Main Vac valve closed
1/21/2011	9:26:20 AM	Bypass valve closed
1/21/2011	9:26:20 AM	Helium valve opened
1/21/2011	9:26:20 AM	Bubbler valve opened
1/21/2011	9:26:20 AM	Helium MFC set to  500.000000
1/21/2011	9:26:20 AM	H2 MFC set to  0.000000
1/21/2011	9:26:20 AM	BCl3 MFC set to  0.000000
1/21/2011	9:26:20 AM	PHl3 MFC set to  0.000000
1/21/2011	9:26:20 AM	SiCl4 MFC set to  0.000000
1/21/2011	9:26:20 AM	Bypass solenoid MFC set to  0.000000
1/21/2011	9:26:20 AM	Tube furnace set to 1000
1/21/2011	9:29:56 AM	Run aborted at 9:29 AM
1/21/2011	9:29:56 AM	Helium valve closed
1/21/2011	9:29:56 AM	H2 valve closed
1/21/2011	9:29:56 AM	BCl3 valve closed
1/21/2011	9:29:56 AM	PH3 valve closed
1/21/2011	9:29:56 AM	SiCl4 pre valve closed
1/21/2011	9:29:56 AM	SiCl4 post valve closed
1/21/2011	9:29:56 AM	Bypass valve closed
1/21/2011	9:29:56 AM	Main Vac valve closed
1/21/2011	9:29:56 AM	Bubbler valve closed
1/21/2011	9:29:56 AM	Helium MFC set to  0.000000
1/21/2011	9:29:56 AM	H2 MFC set to  0.000000
1/21/2011	9:29:56 AM	BCl3 MFC set to  0.000000
1/21/2011	9:29:56 AM	PHl3 MFC set to  0.000000
1/21/2011	9:29:56 AM	SiCl4 MFC set to  0.000000
1/21/2011	9:29:56 AM	Tube furnace set to 0
1/21/2011	9:32:27 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/21/2011	9:32:28 AM	Recipe started at 9:32 AM
1/21/2011	9:32:28 AM	H2 valve closed
1/21/2011	9:32:28 AM	BCl3 valve closed
1/21/2011	9:32:28 AM	PH3 valve closed
1/21/2011	9:32:28 AM	SiCl4 pre valve closed
1/21/2011	9:32:28 AM	SiCl4 post valve closed
1/21/2011	9:32:28 AM	Main Vac valve closed
1/21/2011	9:32:28 AM	Bypass valve closed
1/21/2011	9:32:28 AM	Bubbler valve closed
1/21/2011	9:32:28 AM	Helium valve opened
1/21/2011	9:32:28 AM	Helium MFC set to  500.000000
1/21/2011	9:32:28 AM	H2 MFC set to  0.000000
1/21/2011	9:32:28 AM	BCl3 MFC set to  0.000000
1/21/2011	9:32:28 AM	PHl3 MFC set to  0.000000
1/21/2011	9:32:28 AM	SiCl4 MFC set to  0.000000
1/21/2011	9:32:28 AM	Bypass solenoid MFC set to  0.000000
1/21/2011	9:32:28 AM	Tube furnace set to 0
1/21/2011	9:32:28 AM	Helium valve closed
1/21/2011	9:32:28 AM	H2 valve closed
1/21/2011	9:32:28 AM	BCl3 valve closed
1/21/2011	9:32:28 AM	PH3 valve closed
1/21/2011	9:32:28 AM	SiCl4 pre valve closed
1/21/2011	9:32:28 AM	SiCl4 post valve closed
1/21/2011	9:32:28 AM	Main Vac valve closed
1/21/2011	9:32:28 AM	Bypass valve closed
1/21/2011	9:32:28 AM	Bubbler valve closed
1/21/2011	9:32:28 AM	Helium MFC set to  0.000000
1/21/2011	9:32:28 AM	H2 MFC set to  0.000000
1/21/2011	9:32:28 AM	BCl3 MFC set to  0.000000
1/21/2011	9:32:28 AM	PHl3 MFC set to  0.000000
1/21/2011	9:32:28 AM	SiCl4 MFC set to  0.000000
1/21/2011	9:32:28 AM	Bypass solenoid MFC set to  0.000000
1/21/2011	9:32:28 AM	Tube furnace set to 0
1/21/2011	9:32:28 AM	Run finished at 9:32 AM
1/21/2011	9:32:28 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/21/2011	9:36:17 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/21/2011	9:36:18 AM	Recipe started at 9:36 AM
1/21/2011	9:36:18 AM	Helium valve closed
1/21/2011	9:36:18 AM	H2 valve closed
1/21/2011	9:36:18 AM	BCl3 valve closed
1/21/2011	9:36:18 AM	PH3 valve closed
1/21/2011	9:36:18 AM	SiCl4 pre valve closed
1/21/2011	9:36:18 AM	SiCl4 post valve closed
1/21/2011	9:36:18 AM	Main Vac valve closed
1/21/2011	9:36:18 AM	Bubbler valve closed
1/21/2011	9:36:18 AM	Bypass valve opened
1/21/2011	9:36:18 AM	Helium MFC set to  0.000000
1/21/2011	9:36:18 AM	H2 MFC set to  0.000000
1/21/2011	9:36:18 AM	BCl3 MFC set to  0.000000
1/21/2011	9:36:18 AM	PHl3 MFC set to  0.000000
1/21/2011	9:36:18 AM	SiCl4 MFC set to  0.000000
1/21/2011	9:36:18 AM	Bypass solenoid MFC set to  0.000000
1/21/2011	9:36:18 AM	Tube furnace set to 0
1/21/2011	9:36:47 AM	Helium valve closed
1/21/2011	9:36:47 AM	H2 valve closed
1/21/2011	9:36:47 AM	BCl3 valve closed
1/21/2011	9:36:47 AM	PH3 valve closed
1/21/2011	9:36:47 AM	SiCl4 pre valve closed
1/21/2011	9:36:47 AM	SiCl4 post valve closed
1/21/2011	9:36:47 AM	Bubbler valve closed
1/21/2011	9:36:47 AM	Main Vac valve opened
1/21/2011	9:36:47 AM	Bypass valve opened
1/21/2011	9:36:47 AM	Helium MFC set to  0.000000
1/21/2011	9:36:47 AM	H2 MFC set to  0.000000
1/21/2011	9:36:47 AM	BCl3 MFC set to  0.000000
1/21/2011	9:36:47 AM	PHl3 MFC set to  0.000000
1/21/2011	9:36:47 AM	SiCl4 MFC set to  0.000000
1/21/2011	9:36:47 AM	Bypass solenoid MFC set to  0.000000
1/21/2011	9:36:47 AM	Tube furnace set to 0
1/21/2011	9:36:47 AM	Run finished at 9:36 AM
1/21/2011	9:36:47 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/21/2011	9:37:04 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
1/21/2011	9:37:16 AM	Recipe started at 9:37 AM
1/21/2011	9:37:16 AM	Helium valve closed
1/21/2011	9:37:16 AM	H2 valve closed
1/21/2011	9:37:16 AM	BCl3 valve closed
1/21/2011	9:37:16 AM	PH3 valve closed
1/21/2011	9:37:16 AM	SiCl4 pre valve closed
1/21/2011	9:37:16 AM	SiCl4 post valve closed
1/21/2011	9:37:16 AM	Main Vac valve closed
1/21/2011	9:37:16 AM	Bubbler valve closed
1/21/2011	9:37:16 AM	Bypass valve opened
1/21/2011	9:37:16 AM	Helium MFC set to  0.000000
1/21/2011	9:37:16 AM	H2 MFC set to  0.000000
1/21/2011	9:37:16 AM	BCl3 MFC set to  0.000000
1/21/2011	9:37:16 AM	PHl3 MFC set to  0.000000
1/21/2011	9:37:16 AM	SiCl4 MFC set to  0.000000
1/21/2011	9:37:16 AM	Bypass solenoid MFC set to  0.000000
1/21/2011	9:37:16 AM	Tube furnace set to 0
1/21/2011	9:37:17 AM	Helium valve closed
1/21/2011	9:37:17 AM	H2 valve closed
1/21/2011	9:37:17 AM	BCl3 valve closed
1/21/2011	9:37:17 AM	PH3 valve closed
1/21/2011	9:37:17 AM	SiCl4 pre valve closed
1/21/2011	9:37:17 AM	SiCl4 post valve closed
1/21/2011	9:37:17 AM	Bubbler valve closed
1/21/2011	9:37:17 AM	Main Vac valve opened
1/21/2011	9:37:17 AM	Bypass valve opened
1/21/2011	9:37:17 AM	Helium MFC set to  0.000000
1/21/2011	9:37:17 AM	H2 MFC set to  0.000000
1/21/2011	9:37:17 AM	BCl3 MFC set to  0.000000
1/21/2011	9:37:17 AM	PHl3 MFC set to  0.000000
1/21/2011	9:37:17 AM	SiCl4 MFC set to  0.000000
1/21/2011	9:37:17 AM	Bypass solenoid MFC set to  0.000000
1/21/2011	9:37:17 AM	Tube furnace set to 0
1/21/2011	9:38:17 AM	H2 valve closed
1/21/2011	9:38:17 AM	BCl3 valve closed
1/21/2011	9:38:17 AM	PH3 valve closed
1/21/2011	9:38:17 AM	SiCl4 pre valve closed
1/21/2011	9:38:17 AM	SiCl4 post valve closed
1/21/2011	9:38:17 AM	Bubbler valve closed
1/21/2011	9:38:17 AM	Helium valve opened
1/21/2011	9:38:17 AM	Main Vac valve opened
1/21/2011	9:38:17 AM	Bypass valve opened
1/21/2011	9:38:17 AM	Helium MFC set to  100.000000
1/21/2011	9:38:17 AM	H2 MFC set to  0.000000
1/21/2011	9:38:17 AM	BCl3 MFC set to  0.000000
1/21/2011	9:38:17 AM	PHl3 MFC set to  0.000000
1/21/2011	9:38:17 AM	SiCl4 MFC set to  0.000000
1/21/2011	9:38:17 AM	Bypass solenoid MFC set to  0.000000
1/21/2011	9:38:17 AM	Tube furnace set to 0
1/21/2011	9:39:17 AM	Helium valve closed
1/21/2011	9:39:17 AM	H2 valve closed
1/21/2011	9:39:17 AM	BCl3 valve closed
1/21/2011	9:39:17 AM	PH3 valve closed
1/21/2011	9:39:17 AM	SiCl4 pre valve closed
1/21/2011	9:39:17 AM	SiCl4 post valve closed
1/21/2011	9:39:17 AM	Bubbler valve closed
1/21/2011	9:39:17 AM	Main Vac valve opened
1/21/2011	9:39:17 AM	Bypass valve opened
1/21/2011	9:39:17 AM	Helium MFC set to  0.000000
1/21/2011	9:39:17 AM	H2 MFC set to  0.000000
1/21/2011	9:39:17 AM	BCl3 MFC set to  0.000000
1/21/2011	9:39:17 AM	PHl3 MFC set to  0.000000
1/21/2011	9:39:17 AM	SiCl4 MFC set to  0.000000
1/21/2011	9:39:17 AM	Bypass solenoid MFC set to  0.000000
1/21/2011	9:39:17 AM	Tube furnace set to 0
1/21/2011	9:40:17 AM	H2 valve closed
1/21/2011	9:40:17 AM	BCl3 valve closed
1/21/2011	9:40:17 AM	PH3 valve closed
1/21/2011	9:40:17 AM	SiCl4 pre valve closed
1/21/2011	9:40:17 AM	SiCl4 post valve closed
1/21/2011	9:40:17 AM	Bubbler valve closed
1/21/2011	9:40:17 AM	Helium valve opened
1/21/2011	9:40:17 AM	Main Vac valve opened
1/21/2011	9:40:17 AM	Bypass valve opened
1/21/2011	9:40:17 AM	Helium MFC set to  100.000000
1/21/2011	9:40:17 AM	H2 MFC set to  0.000000
1/21/2011	9:40:17 AM	BCl3 MFC set to  0.000000
1/21/2011	9:40:17 AM	PHl3 MFC set to  0.000000
1/21/2011	9:40:17 AM	SiCl4 MFC set to  0.000000
1/21/2011	9:40:17 AM	Bypass solenoid MFC set to  0.000000
1/21/2011	9:40:17 AM	Tube furnace set to 0
1/21/2011	9:41:17 AM	Helium valve closed
1/21/2011	9:41:17 AM	H2 valve closed
1/21/2011	9:41:17 AM	BCl3 valve closed
1/21/2011	9:41:17 AM	PH3 valve closed
1/21/2011	9:41:17 AM	SiCl4 pre valve closed
1/21/2011	9:41:17 AM	SiCl4 post valve closed
1/21/2011	9:41:17 AM	Bubbler valve closed
1/21/2011	9:41:17 AM	Main Vac valve opened
1/21/2011	9:41:17 AM	Bypass valve opened
1/21/2011	9:41:17 AM	Helium MFC set to  0.000000
1/21/2011	9:41:17 AM	H2 MFC set to  0.000000
1/21/2011	9:41:17 AM	BCl3 MFC set to  0.000000
1/21/2011	9:41:17 AM	PHl3 MFC set to  0.000000
1/21/2011	9:41:17 AM	SiCl4 MFC set to  0.000000
1/21/2011	9:41:17 AM	Bypass solenoid MFC set to  0.000000
1/21/2011	9:41:18 AM	Tube furnace set to 0
1/21/2011	9:42:18 AM	H2 valve closed
1/21/2011	9:42:18 AM	BCl3 valve closed
1/21/2011	9:42:18 AM	PH3 valve closed
1/21/2011	9:42:18 AM	SiCl4 pre valve closed
1/21/2011	9:42:18 AM	SiCl4 post valve closed
1/21/2011	9:42:18 AM	Bubbler valve closed
1/21/2011	9:42:18 AM	Helium valve opened
1/21/2011	9:42:18 AM	Main Vac valve opened
1/21/2011	9:42:18 AM	Bypass valve opened
1/21/2011	9:42:18 AM	Helium MFC set to  100.000000
1/21/2011	9:42:18 AM	H2 MFC set to  0.000000
1/21/2011	9:42:18 AM	BCl3 MFC set to  0.000000
1/21/2011	9:42:18 AM	PHl3 MFC set to  0.000000
1/21/2011	9:42:18 AM	SiCl4 MFC set to  0.000000
1/21/2011	9:42:18 AM	Bypass solenoid MFC set to  0.000000
1/21/2011	9:42:18 AM	Tube furnace set to 0
1/21/2011	9:43:18 AM	Helium valve closed
1/21/2011	9:43:18 AM	H2 valve closed
1/21/2011	9:43:18 AM	BCl3 valve closed
1/21/2011	9:43:18 AM	PH3 valve closed
1/21/2011	9:43:18 AM	SiCl4 pre valve closed
1/21/2011	9:43:18 AM	SiCl4 post valve closed
1/21/2011	9:43:18 AM	Bubbler valve closed
1/21/2011	9:43:18 AM	Main Vac valve opened
1/21/2011	9:43:18 AM	Bypass valve opened
1/21/2011	9:43:18 AM	Helium MFC set to  0.000000
1/21/2011	9:43:18 AM	H2 MFC set to  0.000000
1/21/2011	9:43:18 AM	BCl3 MFC set to  0.000000
1/21/2011	9:43:18 AM	PHl3 MFC set to  0.000000
1/21/2011	9:43:18 AM	SiCl4 MFC set to  0.000000
1/21/2011	9:43:18 AM	Bypass solenoid MFC set to  0.000000
1/21/2011	9:43:18 AM	Tube furnace set to 0
1/21/2011	9:44:18 AM	H2 valve closed
1/21/2011	9:44:18 AM	BCl3 valve closed
1/21/2011	9:44:18 AM	PH3 valve closed
1/21/2011	9:44:18 AM	SiCl4 pre valve closed
1/21/2011	9:44:18 AM	SiCl4 post valve closed
1/21/2011	9:44:18 AM	Bubbler valve closed
1/21/2011	9:44:18 AM	Helium valve opened
1/21/2011	9:44:18 AM	Main Vac valve opened
1/21/2011	9:44:18 AM	Bypass valve opened
1/21/2011	9:44:18 AM	Helium MFC set to  100.000000
1/21/2011	9:44:18 AM	H2 MFC set to  0.000000
1/21/2011	9:44:18 AM	BCl3 MFC set to  0.000000
1/21/2011	9:44:18 AM	PHl3 MFC set to  0.000000
1/21/2011	9:44:18 AM	SiCl4 MFC set to  0.000000
1/21/2011	9:44:18 AM	Bypass solenoid MFC set to  0.000000
1/21/2011	9:44:18 AM	Tube furnace set to 0
1/21/2011	9:45:18 AM	Helium valve closed
1/21/2011	9:45:18 AM	H2 valve closed
1/21/2011	9:45:18 AM	BCl3 valve closed
1/21/2011	9:45:18 AM	PH3 valve closed
1/21/2011	9:45:18 AM	SiCl4 pre valve closed
1/21/2011	9:45:18 AM	SiCl4 post valve closed
1/21/2011	9:45:18 AM	Bubbler valve closed
1/21/2011	9:45:18 AM	Main Vac valve opened
1/21/2011	9:45:18 AM	Bypass valve opened
1/21/2011	9:45:18 AM	Helium MFC set to  0.000000
1/21/2011	9:45:18 AM	H2 MFC set to  0.000000
1/21/2011	9:45:18 AM	BCl3 MFC set to  0.000000
1/21/2011	9:45:18 AM	PHl3 MFC set to  0.000000
1/21/2011	9:45:18 AM	SiCl4 MFC set to  0.000000
1/21/2011	9:45:18 AM	Bypass solenoid MFC set to  0.000000
1/21/2011	9:45:18 AM	Tube furnace set to 0
1/21/2011	9:46:18 AM	H2 valve closed
1/21/2011	9:46:18 AM	BCl3 valve closed
1/21/2011	9:46:18 AM	PH3 valve closed
1/21/2011	9:46:18 AM	SiCl4 pre valve closed
1/21/2011	9:46:18 AM	SiCl4 post valve closed
1/21/2011	9:46:18 AM	Bubbler valve closed
1/21/2011	9:46:18 AM	Helium valve opened
1/21/2011	9:46:18 AM	Main Vac valve opened
1/21/2011	9:46:18 AM	Bypass valve opened
1/21/2011	9:46:18 AM	Helium MFC set to  100.000000
1/21/2011	9:46:18 AM	H2 MFC set to  0.000000
1/21/2011	9:46:18 AM	BCl3 MFC set to  0.000000
1/21/2011	9:46:18 AM	PHl3 MFC set to  0.000000
1/21/2011	9:46:18 AM	SiCl4 MFC set to  0.000000
1/21/2011	9:46:18 AM	Bypass solenoid MFC set to  0.000000
1/21/2011	9:46:19 AM	Tube furnace set to 0
1/21/2011	9:47:19 AM	Helium valve closed
1/21/2011	9:47:19 AM	H2 valve closed
1/21/2011	9:47:19 AM	BCl3 valve closed
1/21/2011	9:47:19 AM	PH3 valve closed
1/21/2011	9:47:19 AM	SiCl4 pre valve closed
1/21/2011	9:47:19 AM	SiCl4 post valve closed
1/21/2011	9:47:19 AM	Bubbler valve closed
1/21/2011	9:47:19 AM	Main Vac valve opened
1/21/2011	9:47:19 AM	Bypass valve opened
1/21/2011	9:47:19 AM	Helium MFC set to  0.000000
1/21/2011	9:47:19 AM	H2 MFC set to  0.000000
1/21/2011	9:47:19 AM	BCl3 MFC set to  0.000000
1/21/2011	9:47:19 AM	PHl3 MFC set to  0.000000
1/21/2011	9:47:19 AM	SiCl4 MFC set to  0.000000
1/21/2011	9:47:19 AM	Bypass solenoid MFC set to  0.000000
1/21/2011	9:47:19 AM	Tube furnace set to 0
1/21/2011	9:48:19 AM	H2 valve closed
1/21/2011	9:48:19 AM	BCl3 valve closed
1/21/2011	9:48:19 AM	PH3 valve closed
1/21/2011	9:48:19 AM	SiCl4 pre valve closed
1/21/2011	9:48:19 AM	SiCl4 post valve closed
1/21/2011	9:48:19 AM	Bubbler valve closed
1/21/2011	9:48:19 AM	Helium valve opened
1/21/2011	9:48:19 AM	Main Vac valve opened
1/21/2011	9:48:19 AM	Bypass valve opened
1/21/2011	9:48:19 AM	Helium MFC set to  100.000000
1/21/2011	9:48:19 AM	H2 MFC set to  0.000000
1/21/2011	9:48:19 AM	BCl3 MFC set to  0.000000
1/21/2011	9:48:19 AM	PHl3 MFC set to  0.000000
1/21/2011	9:48:19 AM	SiCl4 MFC set to  0.000000
1/21/2011	9:48:19 AM	Bypass solenoid MFC set to  0.000000
1/21/2011	9:48:19 AM	Tube furnace set to 0
1/21/2011	9:49:19 AM	Helium valve closed
1/21/2011	9:49:19 AM	H2 valve closed
1/21/2011	9:49:19 AM	BCl3 valve closed
1/21/2011	9:49:19 AM	PH3 valve closed
1/21/2011	9:49:19 AM	SiCl4 pre valve closed
1/21/2011	9:49:19 AM	SiCl4 post valve closed
1/21/2011	9:49:19 AM	Bubbler valve closed
1/21/2011	9:49:19 AM	Main Vac valve opened
1/21/2011	9:49:19 AM	Bypass valve opened
1/21/2011	9:49:19 AM	Helium MFC set to  0.000000
1/21/2011	9:49:19 AM	H2 MFC set to  0.000000
1/21/2011	9:49:19 AM	BCl3 MFC set to  0.000000
1/21/2011	9:49:19 AM	PHl3 MFC set to  0.000000
1/21/2011	9:49:19 AM	SiCl4 MFC set to  0.000000
1/21/2011	9:49:19 AM	Bypass solenoid MFC set to  0.000000
1/21/2011	9:49:19 AM	Tube furnace set to 0
1/21/2011	9:50:19 AM	H2 valve closed
1/21/2011	9:50:19 AM	BCl3 valve closed
1/21/2011	9:50:19 AM	PH3 valve closed
1/21/2011	9:50:19 AM	SiCl4 pre valve closed
1/21/2011	9:50:19 AM	SiCl4 post valve closed
1/21/2011	9:50:19 AM	Bubbler valve closed
1/21/2011	9:50:19 AM	Helium valve opened
1/21/2011	9:50:19 AM	Main Vac valve opened
1/21/2011	9:50:19 AM	Bypass valve opened
1/21/2011	9:50:19 AM	Helium MFC set to  100.000000
1/21/2011	9:50:19 AM	H2 MFC set to  0.000000
1/21/2011	9:50:19 AM	BCl3 MFC set to  0.000000
1/21/2011	9:50:19 AM	PHl3 MFC set to  0.000000
1/21/2011	9:50:19 AM	SiCl4 MFC set to  0.000000
1/21/2011	9:50:19 AM	Bypass solenoid MFC set to  0.000000
1/21/2011	9:50:19 AM	Tube furnace set to 0
1/21/2011	9:51:19 AM	Helium valve closed
1/21/2011	9:51:19 AM	H2 valve closed
1/21/2011	9:51:19 AM	BCl3 valve closed
1/21/2011	9:51:19 AM	PH3 valve closed
1/21/2011	9:51:19 AM	SiCl4 pre valve closed
1/21/2011	9:51:19 AM	SiCl4 post valve closed
1/21/2011	9:51:19 AM	Bubbler valve closed
1/21/2011	9:51:19 AM	Main Vac valve opened
1/21/2011	9:51:19 AM	Bypass valve opened
1/21/2011	9:51:19 AM	Helium MFC set to  0.000000
1/21/2011	9:51:19 AM	H2 MFC set to  0.000000
1/21/2011	9:51:19 AM	BCl3 MFC set to  0.000000
1/21/2011	9:51:19 AM	PHl3 MFC set to  0.000000
1/21/2011	9:51:19 AM	SiCl4 MFC set to  0.000000
1/21/2011	9:51:19 AM	Bypass solenoid MFC set to  0.000000
1/21/2011	9:51:20 AM	Tube furnace set to 0
1/21/2011	9:52:20 AM	H2 valve closed
1/21/2011	9:52:20 AM	BCl3 valve closed
1/21/2011	9:52:20 AM	PH3 valve closed
1/21/2011	9:52:20 AM	SiCl4 pre valve closed
1/21/2011	9:52:20 AM	SiCl4 post valve closed
1/21/2011	9:52:20 AM	Bubbler valve closed
1/21/2011	9:52:20 AM	Helium valve opened
1/21/2011	9:52:20 AM	Main Vac valve opened
1/21/2011	9:52:20 AM	Bypass valve opened
1/21/2011	9:52:20 AM	Helium MFC set to  100.000000
1/21/2011	9:52:20 AM	H2 MFC set to  0.000000
1/21/2011	9:52:20 AM	BCl3 MFC set to  0.000000
1/21/2011	9:52:20 AM	PHl3 MFC set to  0.000000
1/21/2011	9:52:20 AM	SiCl4 MFC set to  0.000000
1/21/2011	9:52:20 AM	Bypass solenoid MFC set to  0.000000
1/21/2011	9:52:20 AM	Tube furnace set to 0
1/21/2011	9:53:20 AM	Helium valve closed
1/21/2011	9:53:20 AM	H2 valve closed
1/21/2011	9:53:20 AM	BCl3 valve closed
1/21/2011	9:53:20 AM	PH3 valve closed
1/21/2011	9:53:20 AM	SiCl4 pre valve closed
1/21/2011	9:53:20 AM	SiCl4 post valve closed
1/21/2011	9:53:20 AM	Bubbler valve closed
1/21/2011	9:53:20 AM	Main Vac valve opened
1/21/2011	9:53:20 AM	Bypass valve opened
1/21/2011	9:53:20 AM	Helium MFC set to  0.000000
1/21/2011	9:53:20 AM	H2 MFC set to  0.000000
1/21/2011	9:53:20 AM	BCl3 MFC set to  0.000000
1/21/2011	9:53:20 AM	PHl3 MFC set to  0.000000
1/21/2011	9:53:20 AM	SiCl4 MFC set to  0.000000
1/21/2011	9:53:20 AM	Bypass solenoid MFC set to  0.000000
1/21/2011	9:53:20 AM	Tube furnace set to 0
1/21/2011	9:54:20 AM	H2 valve closed
1/21/2011	9:54:20 AM	BCl3 valve closed
1/21/2011	9:54:20 AM	PH3 valve closed
1/21/2011	9:54:20 AM	SiCl4 pre valve closed
1/21/2011	9:54:20 AM	SiCl4 post valve closed
1/21/2011	9:54:20 AM	Bubbler valve closed
1/21/2011	9:54:20 AM	Helium valve opened
1/21/2011	9:54:20 AM	Main Vac valve opened
1/21/2011	9:54:20 AM	Bypass valve opened
1/21/2011	9:54:20 AM	Helium MFC set to  100.000000
1/21/2011	9:54:20 AM	H2 MFC set to  0.000000
1/21/2011	9:54:20 AM	BCl3 MFC set to  0.000000
1/21/2011	9:54:20 AM	PHl3 MFC set to  0.000000
1/21/2011	9:54:20 AM	SiCl4 MFC set to  0.000000
1/21/2011	9:54:20 AM	Bypass solenoid MFC set to  0.000000
1/21/2011	9:54:20 AM	Tube furnace set to 0
1/21/2011	9:55:20 AM	Helium valve closed
1/21/2011	9:55:20 AM	H2 valve closed
1/21/2011	9:55:20 AM	BCl3 valve closed
1/21/2011	9:55:20 AM	PH3 valve closed
1/21/2011	9:55:20 AM	SiCl4 pre valve closed
1/21/2011	9:55:20 AM	SiCl4 post valve closed
1/21/2011	9:55:20 AM	Bubbler valve closed
1/21/2011	9:55:20 AM	Main Vac valve opened
1/21/2011	9:55:20 AM	Bypass valve opened
1/21/2011	9:55:20 AM	Helium MFC set to  0.000000
1/21/2011	9:55:20 AM	H2 MFC set to  0.000000
1/21/2011	9:55:20 AM	BCl3 MFC set to  0.000000
1/21/2011	9:55:20 AM	PHl3 MFC set to  0.000000
1/21/2011	9:55:20 AM	SiCl4 MFC set to  0.000000
1/21/2011	9:55:20 AM	Bypass solenoid MFC set to  0.000000
1/21/2011	9:55:21 AM	Tube furnace set to 0
1/21/2011	9:56:21 AM	H2 valve closed
1/21/2011	9:56:21 AM	BCl3 valve closed
1/21/2011	9:56:21 AM	PH3 valve closed
1/21/2011	9:56:21 AM	SiCl4 pre valve closed
1/21/2011	9:56:21 AM	SiCl4 post valve closed
1/21/2011	9:56:21 AM	Bubbler valve closed
1/21/2011	9:56:21 AM	Helium valve opened
1/21/2011	9:56:21 AM	Main Vac valve opened
1/21/2011	9:56:21 AM	Bypass valve opened
1/21/2011	9:56:21 AM	Helium MFC set to  100.000000
1/21/2011	9:56:21 AM	H2 MFC set to  0.000000
1/21/2011	9:56:21 AM	BCl3 MFC set to  0.000000
1/21/2011	9:56:21 AM	PHl3 MFC set to  0.000000
1/21/2011	9:56:21 AM	SiCl4 MFC set to  0.000000
1/21/2011	9:56:21 AM	Bypass solenoid MFC set to  0.000000
1/21/2011	9:56:21 AM	Tube furnace set to 0
1/21/2011	9:56:58 AM	Helium valve closed
1/21/2011	9:56:58 AM	H2 valve closed
1/21/2011	9:56:58 AM	BCl3 valve closed
1/21/2011	9:56:58 AM	PH3 valve closed
1/21/2011	9:56:58 AM	SiCl4 pre valve closed
1/21/2011	9:56:58 AM	SiCl4 post valve closed
1/21/2011	9:56:58 AM	Bubbler valve closed
1/21/2011	9:56:58 AM	Main Vac valve opened
1/21/2011	9:56:58 AM	Bypass valve opened
1/21/2011	9:56:58 AM	Helium MFC set to  0.000000
1/21/2011	9:56:58 AM	H2 MFC set to  0.000000
1/21/2011	9:56:58 AM	BCl3 MFC set to  0.000000
1/21/2011	9:56:58 AM	PHl3 MFC set to  0.000000
1/21/2011	9:56:58 AM	SiCl4 MFC set to  0.000000
1/21/2011	9:56:58 AM	Bypass solenoid MFC set to  0.000000
1/21/2011	9:56:58 AM	Tube furnace set to 0
1/21/2011	9:56:59 AM	Run finished at 9:56 AM
1/21/2011	9:56:59 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
1/21/2011	9:57:35 AM	Bypass valve closed
1/21/2011	9:57:35 AM	Main Vac valve closed
1/21/2011	9:57:58 AM	Bypass valve opened
1/21/2011	9:57:58 AM	Main Vac valve opened
1/21/2011	9:58:34 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
1/21/2011	9:58:47 AM	Recipe started at 9:58 AM
1/21/2011	9:58:47 AM	Helium valve closed
1/21/2011	9:58:47 AM	H2 valve closed
1/21/2011	9:58:47 AM	BCl3 valve closed
1/21/2011	9:58:47 AM	PH3 valve closed
1/21/2011	9:58:47 AM	SiCl4 pre valve closed
1/21/2011	9:58:47 AM	SiCl4 post valve closed
1/21/2011	9:58:47 AM	Main Vac valve closed
1/21/2011	9:58:47 AM	Bubbler valve closed
1/21/2011	9:58:47 AM	Bypass valve opened
1/21/2011	9:58:47 AM	Helium MFC set to  0.000000
1/21/2011	9:58:47 AM	H2 MFC set to  0.000000
1/21/2011	9:58:47 AM	BCl3 MFC set to  0.000000
1/21/2011	9:58:47 AM	PHl3 MFC set to  0.000000
1/21/2011	9:58:47 AM	SiCl4 MFC set to  0.000000
1/21/2011	9:58:47 AM	Bypass solenoid MFC set to  0.000000
1/21/2011	9:58:47 AM	Tube furnace set to 0
1/21/2011	9:58:47 AM	Helium valve closed
1/21/2011	9:58:47 AM	H2 valve closed
1/21/2011	9:58:47 AM	BCl3 valve closed
1/21/2011	9:58:47 AM	PH3 valve closed
1/21/2011	9:58:47 AM	SiCl4 pre valve closed
1/21/2011	9:58:47 AM	SiCl4 post valve closed
1/21/2011	9:58:47 AM	Bubbler valve closed
1/21/2011	9:58:47 AM	Main Vac valve opened
1/21/2011	9:58:47 AM	Bypass valve opened
1/21/2011	9:58:47 AM	Helium MFC set to  0.000000
1/21/2011	9:58:47 AM	H2 MFC set to  0.000000
1/21/2011	9:58:47 AM	BCl3 MFC set to  0.000000
1/21/2011	9:58:47 AM	PHl3 MFC set to  0.000000
1/21/2011	9:58:47 AM	SiCl4 MFC set to  0.000000
1/21/2011	9:58:47 AM	Bypass solenoid MFC set to  0.000000
1/21/2011	9:58:47 AM	Tube furnace set to 0
1/21/2011	9:58:51 AM	H2 valve closed
1/21/2011	9:58:51 AM	BCl3 valve closed
1/21/2011	9:58:51 AM	PH3 valve closed
1/21/2011	9:58:51 AM	SiCl4 pre valve closed
1/21/2011	9:58:51 AM	SiCl4 post valve closed
1/21/2011	9:58:51 AM	Bubbler valve closed
1/21/2011	9:58:51 AM	Helium valve opened
1/21/2011	9:58:51 AM	Main Vac valve opened
1/21/2011	9:58:51 AM	Bypass valve opened
1/21/2011	9:58:51 AM	Helium MFC set to  100.000000
1/21/2011	9:58:51 AM	H2 MFC set to  0.000000
1/21/2011	9:58:51 AM	BCl3 MFC set to  0.000000
1/21/2011	9:58:51 AM	PHl3 MFC set to  0.000000
1/21/2011	9:58:51 AM	SiCl4 MFC set to  0.000000
1/21/2011	9:58:51 AM	Bypass solenoid MFC set to  0.000000
1/21/2011	9:58:51 AM	Tube furnace set to 0
1/21/2011	9:58:53 AM	Helium valve closed
1/21/2011	9:58:53 AM	H2 valve closed
1/21/2011	9:58:53 AM	BCl3 valve closed
1/21/2011	9:58:53 AM	PH3 valve closed
1/21/2011	9:58:53 AM	SiCl4 pre valve closed
1/21/2011	9:58:53 AM	SiCl4 post valve closed
1/21/2011	9:58:53 AM	Bubbler valve closed
1/21/2011	9:58:53 AM	Main Vac valve opened
1/21/2011	9:58:53 AM	Bypass valve opened
1/21/2011	9:58:53 AM	Helium MFC set to  0.000000
1/21/2011	9:58:53 AM	H2 MFC set to  0.000000
1/21/2011	9:58:53 AM	BCl3 MFC set to  0.000000
1/21/2011	9:58:53 AM	PHl3 MFC set to  0.000000
1/21/2011	9:58:53 AM	SiCl4 MFC set to  0.000000
1/21/2011	9:58:53 AM	Bypass solenoid MFC set to  0.000000
1/21/2011	9:58:53 AM	Tube furnace set to 0
1/21/2011	9:58:55 AM	H2 valve closed
1/21/2011	9:58:55 AM	BCl3 valve closed
1/21/2011	9:58:55 AM	PH3 valve closed
1/21/2011	9:58:55 AM	SiCl4 pre valve closed
1/21/2011	9:58:55 AM	SiCl4 post valve closed
1/21/2011	9:58:55 AM	Bubbler valve closed
1/21/2011	9:58:55 AM	Helium valve opened
1/21/2011	9:58:55 AM	Main Vac valve opened
1/21/2011	9:58:55 AM	Bypass valve opened
1/21/2011	9:58:55 AM	Helium MFC set to  100.000000
1/21/2011	9:58:55 AM	H2 MFC set to  0.000000
1/21/2011	9:58:55 AM	BCl3 MFC set to  0.000000
1/21/2011	9:58:55 AM	PHl3 MFC set to  0.000000
1/21/2011	9:58:55 AM	SiCl4 MFC set to  0.000000
1/21/2011	9:58:55 AM	Bypass solenoid MFC set to  0.000000
1/21/2011	9:58:55 AM	Tube furnace set to 0
1/21/2011	9:58:55 AM	Helium valve closed
1/21/2011	9:58:55 AM	H2 valve closed
1/21/2011	9:58:55 AM	BCl3 valve closed
1/21/2011	9:58:55 AM	PH3 valve closed
1/21/2011	9:58:55 AM	SiCl4 pre valve closed
1/21/2011	9:58:55 AM	SiCl4 post valve closed
1/21/2011	9:58:55 AM	Bubbler valve closed
1/21/2011	9:58:55 AM	Main Vac valve opened
1/21/2011	9:58:55 AM	Bypass valve opened
1/21/2011	9:58:55 AM	Helium MFC set to  0.000000
1/21/2011	9:58:55 AM	H2 MFC set to  0.000000
1/21/2011	9:58:55 AM	BCl3 MFC set to  0.000000
1/21/2011	9:58:55 AM	PHl3 MFC set to  0.000000
1/21/2011	9:58:55 AM	SiCl4 MFC set to  0.000000
1/21/2011	9:58:55 AM	Bypass solenoid MFC set to  0.000000
1/21/2011	9:58:56 AM	Tube furnace set to 0
1/21/2011	9:58:56 AM	H2 valve closed
1/21/2011	9:58:56 AM	BCl3 valve closed
1/21/2011	9:58:56 AM	PH3 valve closed
1/21/2011	9:58:56 AM	SiCl4 pre valve closed
1/21/2011	9:58:56 AM	SiCl4 post valve closed
1/21/2011	9:58:56 AM	Bubbler valve closed
1/21/2011	9:58:56 AM	Helium valve opened
1/21/2011	9:58:56 AM	Main Vac valve opened
1/21/2011	9:58:56 AM	Bypass valve opened
1/21/2011	9:58:56 AM	Helium MFC set to  100.000000
1/21/2011	9:58:56 AM	H2 MFC set to  0.000000
1/21/2011	9:58:56 AM	BCl3 MFC set to  0.000000
1/21/2011	9:58:56 AM	PHl3 MFC set to  0.000000
1/21/2011	9:58:56 AM	SiCl4 MFC set to  0.000000
1/21/2011	9:58:56 AM	Bypass solenoid MFC set to  0.000000
1/21/2011	9:58:56 AM	Tube furnace set to 0
1/21/2011	9:58:57 AM	Helium valve closed
1/21/2011	9:58:57 AM	H2 valve closed
1/21/2011	9:58:57 AM	BCl3 valve closed
1/21/2011	9:58:57 AM	PH3 valve closed
1/21/2011	9:58:57 AM	SiCl4 pre valve closed
1/21/2011	9:58:57 AM	SiCl4 post valve closed
1/21/2011	9:58:57 AM	Bubbler valve closed
1/21/2011	9:58:57 AM	Main Vac valve opened
1/21/2011	9:58:57 AM	Bypass valve opened
1/21/2011	9:58:57 AM	Helium MFC set to  0.000000
1/21/2011	9:58:57 AM	H2 MFC set to  0.000000
1/21/2011	9:58:57 AM	BCl3 MFC set to  0.000000
1/21/2011	9:58:57 AM	PHl3 MFC set to  0.000000
1/21/2011	9:58:57 AM	SiCl4 MFC set to  0.000000
1/21/2011	9:58:57 AM	Bypass solenoid MFC set to  0.000000
1/21/2011	9:58:57 AM	Tube furnace set to 0
1/21/2011	9:58:57 AM	H2 valve closed
1/21/2011	9:58:57 AM	BCl3 valve closed
1/21/2011	9:58:57 AM	PH3 valve closed
1/21/2011	9:58:57 AM	SiCl4 pre valve closed
1/21/2011	9:58:57 AM	SiCl4 post valve closed
1/21/2011	9:58:57 AM	Bubbler valve closed
1/21/2011	9:58:57 AM	Helium valve opened
1/21/2011	9:58:57 AM	Main Vac valve opened
1/21/2011	9:58:57 AM	Bypass valve opened
1/21/2011	9:58:57 AM	Helium MFC set to  100.000000
1/21/2011	9:58:57 AM	H2 MFC set to  0.000000
1/21/2011	9:58:57 AM	BCl3 MFC set to  0.000000
1/21/2011	9:58:57 AM	PHl3 MFC set to  0.000000
1/21/2011	9:58:57 AM	SiCl4 MFC set to  0.000000
1/21/2011	9:58:57 AM	Bypass solenoid MFC set to  0.000000
1/21/2011	9:58:57 AM	Tube furnace set to 0
1/21/2011	9:58:58 AM	Helium valve closed
1/21/2011	9:58:58 AM	H2 valve closed
1/21/2011	9:58:58 AM	BCl3 valve closed
1/21/2011	9:58:58 AM	PH3 valve closed
1/21/2011	9:58:58 AM	SiCl4 pre valve closed
1/21/2011	9:58:58 AM	SiCl4 post valve closed
1/21/2011	9:58:58 AM	Bubbler valve closed
1/21/2011	9:58:58 AM	Main Vac valve opened
1/21/2011	9:58:58 AM	Bypass valve opened
1/21/2011	9:58:58 AM	Helium MFC set to  0.000000
1/21/2011	9:58:58 AM	H2 MFC set to  0.000000
1/21/2011	9:58:58 AM	BCl3 MFC set to  0.000000
1/21/2011	9:58:58 AM	PHl3 MFC set to  0.000000
1/21/2011	9:58:58 AM	SiCl4 MFC set to  0.000000
1/21/2011	9:58:58 AM	Bypass solenoid MFC set to  0.000000
1/21/2011	9:58:58 AM	Tube furnace set to 0
1/21/2011	9:58:59 AM	H2 valve closed
1/21/2011	9:58:59 AM	BCl3 valve closed
1/21/2011	9:58:59 AM	PH3 valve closed
1/21/2011	9:58:59 AM	SiCl4 pre valve closed
1/21/2011	9:58:59 AM	SiCl4 post valve closed
1/21/2011	9:58:59 AM	Bubbler valve closed
1/21/2011	9:58:59 AM	Helium valve opened
1/21/2011	9:58:59 AM	Main Vac valve opened
1/21/2011	9:58:59 AM	Bypass valve opened
1/21/2011	9:58:59 AM	Helium MFC set to  100.000000
1/21/2011	9:58:59 AM	H2 MFC set to  0.000000
1/21/2011	9:58:59 AM	BCl3 MFC set to  0.000000
1/21/2011	9:58:59 AM	PHl3 MFC set to  0.000000
1/21/2011	9:58:59 AM	SiCl4 MFC set to  0.000000
1/21/2011	9:58:59 AM	Bypass solenoid MFC set to  0.000000
1/21/2011	9:58:59 AM	Tube furnace set to 0
1/21/2011	9:58:59 AM	Helium valve closed
1/21/2011	9:58:59 AM	H2 valve closed
1/21/2011	9:58:59 AM	BCl3 valve closed
1/21/2011	9:58:59 AM	PH3 valve closed
1/21/2011	9:58:59 AM	SiCl4 pre valve closed
1/21/2011	9:58:59 AM	SiCl4 post valve closed
1/21/2011	9:58:59 AM	Bubbler valve closed
1/21/2011	9:58:59 AM	Main Vac valve opened
1/21/2011	9:58:59 AM	Bypass valve opened
1/21/2011	9:58:59 AM	Helium MFC set to  0.000000
1/21/2011	9:58:59 AM	H2 MFC set to  0.000000
1/21/2011	9:58:59 AM	BCl3 MFC set to  0.000000
1/21/2011	9:58:59 AM	PHl3 MFC set to  0.000000
1/21/2011	9:58:59 AM	SiCl4 MFC set to  0.000000
1/21/2011	9:58:59 AM	Bypass solenoid MFC set to  0.000000
1/21/2011	9:58:59 AM	Tube furnace set to 0
1/21/2011	9:59:05 AM	H2 valve closed
1/21/2011	9:59:05 AM	BCl3 valve closed
1/21/2011	9:59:05 AM	PH3 valve closed
1/21/2011	9:59:05 AM	SiCl4 pre valve closed
1/21/2011	9:59:05 AM	SiCl4 post valve closed
1/21/2011	9:59:05 AM	Bubbler valve closed
1/21/2011	9:59:05 AM	Helium valve opened
1/21/2011	9:59:05 AM	Main Vac valve opened
1/21/2011	9:59:05 AM	Bypass valve opened
1/21/2011	9:59:05 AM	Helium MFC set to  100.000000
1/21/2011	9:59:05 AM	H2 MFC set to  0.000000
1/21/2011	9:59:05 AM	BCl3 MFC set to  0.000000
1/21/2011	9:59:05 AM	PHl3 MFC set to  0.000000
1/21/2011	9:59:05 AM	SiCl4 MFC set to  0.000000
1/21/2011	9:59:05 AM	Bypass solenoid MFC set to  0.000000
1/21/2011	9:59:05 AM	Tube furnace set to 0
1/21/2011	9:59:05 AM	Helium valve closed
1/21/2011	9:59:05 AM	H2 valve closed
1/21/2011	9:59:05 AM	BCl3 valve closed
1/21/2011	9:59:05 AM	PH3 valve closed
1/21/2011	9:59:05 AM	SiCl4 pre valve closed
1/21/2011	9:59:05 AM	SiCl4 post valve closed
1/21/2011	9:59:05 AM	Bubbler valve closed
1/21/2011	9:59:05 AM	Main Vac valve opened
1/21/2011	9:59:05 AM	Bypass valve opened
1/21/2011	9:59:05 AM	Helium MFC set to  0.000000
1/21/2011	9:59:05 AM	H2 MFC set to  0.000000
1/21/2011	9:59:05 AM	BCl3 MFC set to  0.000000
1/21/2011	9:59:05 AM	PHl3 MFC set to  0.000000
1/21/2011	9:59:05 AM	SiCl4 MFC set to  0.000000
1/21/2011	9:59:05 AM	Bypass solenoid MFC set to  0.000000
1/21/2011	9:59:05 AM	Tube furnace set to 0
1/21/2011	10:00:06 AM	H2 valve closed
1/21/2011	10:00:06 AM	BCl3 valve closed
1/21/2011	10:00:06 AM	PH3 valve closed
1/21/2011	10:00:06 AM	SiCl4 pre valve closed
1/21/2011	10:00:06 AM	SiCl4 post valve closed
1/21/2011	10:00:06 AM	Bubbler valve closed
1/21/2011	10:00:06 AM	Helium valve opened
1/21/2011	10:00:06 AM	Main Vac valve opened
1/21/2011	10:00:06 AM	Bypass valve opened
1/21/2011	10:00:06 AM	Helium MFC set to  100.000000
1/21/2011	10:00:06 AM	H2 MFC set to  0.000000
1/21/2011	10:00:06 AM	BCl3 MFC set to  0.000000
1/21/2011	10:00:06 AM	PHl3 MFC set to  0.000000
1/21/2011	10:00:06 AM	SiCl4 MFC set to  0.000000
1/21/2011	10:00:06 AM	Bypass solenoid MFC set to  0.000000
1/21/2011	10:00:06 AM	Tube furnace set to 0
1/21/2011	10:01:06 AM	Helium valve closed
1/21/2011	10:01:06 AM	H2 valve closed
1/21/2011	10:01:06 AM	BCl3 valve closed
1/21/2011	10:01:06 AM	PH3 valve closed
1/21/2011	10:01:06 AM	SiCl4 pre valve closed
1/21/2011	10:01:06 AM	SiCl4 post valve closed
1/21/2011	10:01:06 AM	Bubbler valve closed
1/21/2011	10:01:06 AM	Main Vac valve opened
1/21/2011	10:01:06 AM	Bypass valve opened
1/21/2011	10:01:06 AM	Helium MFC set to  0.000000
1/21/2011	10:01:06 AM	H2 MFC set to  0.000000
1/21/2011	10:01:06 AM	BCl3 MFC set to  0.000000
1/21/2011	10:01:06 AM	PHl3 MFC set to  0.000000
1/21/2011	10:01:06 AM	SiCl4 MFC set to  0.000000
1/21/2011	10:01:06 AM	Bypass solenoid MFC set to  0.000000
1/21/2011	10:01:06 AM	Tube furnace set to 0
1/21/2011	10:02:06 AM	H2 valve closed
1/21/2011	10:02:06 AM	BCl3 valve closed
1/21/2011	10:02:06 AM	PH3 valve closed
1/21/2011	10:02:06 AM	SiCl4 pre valve closed
1/21/2011	10:02:06 AM	SiCl4 post valve closed
1/21/2011	10:02:06 AM	Bubbler valve closed
1/21/2011	10:02:06 AM	Helium valve opened
1/21/2011	10:02:06 AM	Main Vac valve opened
1/21/2011	10:02:06 AM	Bypass valve opened
1/21/2011	10:02:06 AM	Helium MFC set to  100.000000
1/21/2011	10:02:06 AM	H2 MFC set to  0.000000
1/21/2011	10:02:06 AM	BCl3 MFC set to  0.000000
1/21/2011	10:02:06 AM	PHl3 MFC set to  0.000000
1/21/2011	10:02:06 AM	SiCl4 MFC set to  0.000000
1/21/2011	10:02:06 AM	Bypass solenoid MFC set to  0.000000
1/21/2011	10:02:06 AM	Tube furnace set to 0
1/21/2011	10:03:06 AM	Helium valve closed
1/21/2011	10:03:06 AM	H2 valve closed
1/21/2011	10:03:06 AM	BCl3 valve closed
1/21/2011	10:03:06 AM	PH3 valve closed
1/21/2011	10:03:06 AM	SiCl4 pre valve closed
1/21/2011	10:03:06 AM	SiCl4 post valve closed
1/21/2011	10:03:06 AM	Bubbler valve closed
1/21/2011	10:03:06 AM	Main Vac valve opened
1/21/2011	10:03:06 AM	Bypass valve opened
1/21/2011	10:03:06 AM	Helium MFC set to  0.000000
1/21/2011	10:03:06 AM	H2 MFC set to  0.000000
1/21/2011	10:03:06 AM	BCl3 MFC set to  0.000000
1/21/2011	10:03:06 AM	PHl3 MFC set to  0.000000
1/21/2011	10:03:06 AM	SiCl4 MFC set to  0.000000
1/21/2011	10:03:06 AM	Bypass solenoid MFC set to  0.000000
1/21/2011	10:03:06 AM	Tube furnace set to 0
1/21/2011	10:04:06 AM	H2 valve closed
1/21/2011	10:04:06 AM	BCl3 valve closed
1/21/2011	10:04:06 AM	PH3 valve closed
1/21/2011	10:04:06 AM	SiCl4 pre valve closed
1/21/2011	10:04:06 AM	SiCl4 post valve closed
1/21/2011	10:04:06 AM	Bubbler valve closed
1/21/2011	10:04:06 AM	Helium valve opened
1/21/2011	10:04:06 AM	Main Vac valve opened
1/21/2011	10:04:06 AM	Bypass valve opened
1/21/2011	10:04:06 AM	Helium MFC set to  100.000000
1/21/2011	10:04:06 AM	H2 MFC set to  0.000000
1/21/2011	10:04:06 AM	BCl3 MFC set to  0.000000
1/21/2011	10:04:06 AM	PHl3 MFC set to  0.000000
1/21/2011	10:04:06 AM	SiCl4 MFC set to  0.000000
1/21/2011	10:04:06 AM	Bypass solenoid MFC set to  0.000000
1/21/2011	10:04:07 AM	Tube furnace set to 0
1/21/2011	10:05:07 AM	Helium valve closed
1/21/2011	10:05:07 AM	H2 valve closed
1/21/2011	10:05:07 AM	BCl3 valve closed
1/21/2011	10:05:07 AM	PH3 valve closed
1/21/2011	10:05:07 AM	SiCl4 pre valve closed
1/21/2011	10:05:07 AM	SiCl4 post valve closed
1/21/2011	10:05:07 AM	Bubbler valve closed
1/21/2011	10:05:07 AM	Main Vac valve opened
1/21/2011	10:05:07 AM	Bypass valve opened
1/21/2011	10:05:07 AM	Helium MFC set to  0.000000
1/21/2011	10:05:07 AM	H2 MFC set to  0.000000
1/21/2011	10:05:07 AM	BCl3 MFC set to  0.000000
1/21/2011	10:05:07 AM	PHl3 MFC set to  0.000000
1/21/2011	10:05:07 AM	SiCl4 MFC set to  0.000000
1/21/2011	10:05:07 AM	Bypass solenoid MFC set to  0.000000
1/21/2011	10:05:07 AM	Tube furnace set to 0
1/21/2011	10:06:07 AM	H2 valve closed
1/21/2011	10:06:07 AM	BCl3 valve closed
1/21/2011	10:06:07 AM	PH3 valve closed
1/21/2011	10:06:07 AM	SiCl4 pre valve closed
1/21/2011	10:06:07 AM	SiCl4 post valve closed
1/21/2011	10:06:07 AM	Bubbler valve closed
1/21/2011	10:06:07 AM	Helium valve opened
1/21/2011	10:06:07 AM	Main Vac valve opened
1/21/2011	10:06:07 AM	Bypass valve opened
1/21/2011	10:06:07 AM	Helium MFC set to  100.000000
1/21/2011	10:06:07 AM	H2 MFC set to  0.000000
1/21/2011	10:06:07 AM	BCl3 MFC set to  0.000000
1/21/2011	10:06:07 AM	PHl3 MFC set to  0.000000
1/21/2011	10:06:07 AM	SiCl4 MFC set to  0.000000
1/21/2011	10:06:07 AM	Bypass solenoid MFC set to  0.000000
1/21/2011	10:06:07 AM	Tube furnace set to 0
1/21/2011	10:07:07 AM	Helium valve closed
1/21/2011	10:07:07 AM	H2 valve closed
1/21/2011	10:07:07 AM	BCl3 valve closed
1/21/2011	10:07:07 AM	PH3 valve closed
1/21/2011	10:07:07 AM	SiCl4 pre valve closed
1/21/2011	10:07:07 AM	SiCl4 post valve closed
1/21/2011	10:07:07 AM	Bubbler valve closed
1/21/2011	10:07:07 AM	Main Vac valve opened
1/21/2011	10:07:07 AM	Bypass valve opened
1/21/2011	10:07:07 AM	Helium MFC set to  0.000000
1/21/2011	10:07:07 AM	H2 MFC set to  0.000000
1/21/2011	10:07:07 AM	BCl3 MFC set to  0.000000
1/21/2011	10:07:07 AM	PHl3 MFC set to  0.000000
1/21/2011	10:07:07 AM	SiCl4 MFC set to  0.000000
1/21/2011	10:07:07 AM	Bypass solenoid MFC set to  0.000000
1/21/2011	10:07:07 AM	Tube furnace set to 0
1/21/2011	10:07:08 AM	Run finished at 10:07 AM
1/21/2011	10:07:08 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
1/21/2011	10:16:56 AM	Recipe started at 10:16 AM
1/21/2011	10:16:56 AM	Helium valve closed
1/21/2011	10:16:56 AM	BCl3 valve closed
1/21/2011	10:16:56 AM	PH3 valve closed
1/21/2011	10:16:56 AM	SiCl4 pre valve closed
1/21/2011	10:16:56 AM	SiCl4 post valve closed
1/21/2011	10:16:56 AM	Main Vac valve closed
1/21/2011	10:16:56 AM	Bypass valve closed
1/21/2011	10:16:56 AM	Bubbler valve closed
1/21/2011	10:16:56 AM	H2 valve opened
1/21/2011	10:16:56 AM	Helium MFC set to  0.000000
1/21/2011	10:16:56 AM	H2 MFC set to  500.000000
1/21/2011	10:16:56 AM	BCl3 MFC set to  0.000000
1/21/2011	10:16:56 AM	PHl3 MFC set to  0.000000
1/21/2011	10:16:56 AM	SiCl4 MFC set to  0.000000
1/21/2011	10:16:56 AM	Bypass solenoid MFC set to  0.000000
1/21/2011	10:16:56 AM	Tube furnace set to 0
1/21/2011	10:18:15 AM	Helium valve closed
1/21/2011	10:18:15 AM	BCl3 valve closed
1/21/2011	10:18:15 AM	PH3 valve closed
1/21/2011	10:18:15 AM	SiCl4 pre valve closed
1/21/2011	10:18:15 AM	SiCl4 post valve closed
1/21/2011	10:18:15 AM	Main Vac valve closed
1/21/2011	10:18:15 AM	Bypass valve closed
1/21/2011	10:18:15 AM	H2 valve opened
1/21/2011	10:18:15 AM	Bubbler valve opened
1/21/2011	10:18:15 AM	Helium MFC set to  0.000000
1/21/2011	10:18:16 AM	H2 MFC set to  500.000000
1/21/2011	10:18:16 AM	BCl3 MFC set to  0.000000
1/21/2011	10:18:16 AM	PHl3 MFC set to  0.000000
1/21/2011	10:18:16 AM	SiCl4 MFC set to  0.000000
1/21/2011	10:18:16 AM	Bypass solenoid MFC set to  0.000000
1/21/2011	10:18:16 AM	Tube furnace set to 1000
1/21/2011	10:38:16 AM	Helium valve closed
1/21/2011	10:38:16 AM	BCl3 valve closed
1/21/2011	10:38:16 AM	Main Vac valve closed
1/21/2011	10:38:16 AM	Bypass valve closed
1/21/2011	10:38:16 AM	H2 valve opened
1/21/2011	10:38:16 AM	PH3 valve opened
1/21/2011	10:38:16 AM	SiCl4 pre valve opened
1/21/2011	10:38:16 AM	SiCl4 post valve opened
1/21/2011	10:38:16 AM	Bubbler valve opened
1/21/2011	10:38:16 AM	Helium MFC set to  0.000000
1/21/2011	10:38:16 AM	H2 MFC set to  500.000000
1/21/2011	10:38:16 AM	BCl3 MFC set to  0.000000
1/21/2011	10:38:16 AM	PHl3 MFC set to  1.000000
1/21/2011	10:38:16 AM	SiCl4 MFC set to  50.000000
1/21/2011	10:38:16 AM	Bypass solenoid MFC set to  0.000000
1/21/2011	10:38:16 AM	Tube furnace set to 1000
1/21/2011	10:55:16 AM	H2 valve closed
1/21/2011	10:55:16 AM	BCl3 valve closed
1/21/2011	10:55:16 AM	PH3 valve closed
1/21/2011	10:55:16 AM	SiCl4 pre valve closed
1/21/2011	10:55:16 AM	SiCl4 post valve closed
1/21/2011	10:55:16 AM	Main Vac valve closed
1/21/2011	10:55:16 AM	Bypass valve closed
1/21/2011	10:55:16 AM	Helium valve opened
1/21/2011	10:55:16 AM	Bubbler valve opened
1/21/2011	10:55:16 AM	Helium MFC set to  500.000000
1/21/2011	10:55:16 AM	H2 MFC set to  0.000000
1/21/2011	10:55:16 AM	BCl3 MFC set to  0.000000
1/21/2011	10:55:16 AM	PHl3 MFC set to  0.000000
1/21/2011	10:55:16 AM	SiCl4 MFC set to  0.000000
1/21/2011	10:55:16 AM	Bypass solenoid MFC set to  0.000000
1/21/2011	10:55:16 AM	Tube furnace set to 0
1/21/2011	11:15:16 AM	Helium valve closed
1/21/2011	11:15:16 AM	H2 valve closed
1/21/2011	11:15:16 AM	BCl3 valve closed
1/21/2011	11:15:16 AM	PH3 valve closed
1/21/2011	11:15:16 AM	SiCl4 pre valve closed
1/21/2011	11:15:16 AM	SiCl4 post valve closed
1/21/2011	11:15:16 AM	Main Vac valve closed
1/21/2011	11:15:16 AM	Bypass valve closed
1/21/2011	11:15:16 AM	Bubbler valve closed
1/21/2011	11:15:16 AM	Helium MFC set to  0.000000
1/21/2011	11:15:16 AM	H2 MFC set to  0.000000
1/21/2011	11:15:16 AM	BCl3 MFC set to  0.000000
1/21/2011	11:15:16 AM	PHl3 MFC set to  0.000000
1/21/2011	11:15:16 AM	SiCl4 MFC set to  0.000000
1/21/2011	11:15:16 AM	Bypass solenoid MFC set to  0.000000
1/21/2011	11:15:16 AM	Tube furnace set to 0
1/21/2011	11:15:17 AM	Run finished at 11:15 AM
1/21/2011	11:29:32 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/21/2011	11:29:32 AM	Recipe started at 11:29 AM
1/21/2011	11:29:32 AM	H2 valve closed
1/21/2011	11:29:32 AM	BCl3 valve closed
1/21/2011	11:29:32 AM	PH3 valve closed
1/21/2011	11:29:32 AM	SiCl4 pre valve closed
1/21/2011	11:29:32 AM	SiCl4 post valve closed
1/21/2011	11:29:32 AM	Main Vac valve closed
1/21/2011	11:29:32 AM	Bypass valve closed
1/21/2011	11:29:32 AM	Bubbler valve closed
1/21/2011	11:29:32 AM	Helium valve opened
1/21/2011	11:29:32 AM	Helium MFC set to  500.000000
1/21/2011	11:29:32 AM	H2 MFC set to  0.000000
1/21/2011	11:29:32 AM	BCl3 MFC set to  0.000000
1/21/2011	11:29:32 AM	PHl3 MFC set to  0.000000
1/21/2011	11:29:32 AM	SiCl4 MFC set to  0.000000
1/21/2011	11:29:32 AM	Bypass solenoid MFC set to  0.000000
1/21/2011	11:29:32 AM	Tube furnace set to 0
1/21/2011	11:29:37 AM	Helium valve closed
1/21/2011	11:29:37 AM	H2 valve closed
1/21/2011	11:29:37 AM	BCl3 valve closed
1/21/2011	11:29:37 AM	PH3 valve closed
1/21/2011	11:29:37 AM	SiCl4 pre valve closed
1/21/2011	11:29:37 AM	SiCl4 post valve closed
1/21/2011	11:29:37 AM	Main Vac valve closed
1/21/2011	11:29:37 AM	Bypass valve closed
1/21/2011	11:29:37 AM	Bubbler valve closed
1/21/2011	11:29:37 AM	Helium MFC set to  0.000000
1/21/2011	11:29:37 AM	H2 MFC set to  0.000000
1/21/2011	11:29:37 AM	BCl3 MFC set to  0.000000
1/21/2011	11:29:37 AM	PHl3 MFC set to  0.000000
1/21/2011	11:29:38 AM	SiCl4 MFC set to  0.000000
1/21/2011	11:29:38 AM	Bypass solenoid MFC set to  0.000000
1/21/2011	11:29:38 AM	Tube furnace set to 0
1/21/2011	11:29:38 AM	Run finished at 11:29 AM
1/21/2011	11:29:38 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/21/2011	11:33:41 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/21/2011	11:33:42 AM	Recipe started at 11:33 AM
1/21/2011	11:33:42 AM	Helium valve closed
1/21/2011	11:33:42 AM	H2 valve closed
1/21/2011	11:33:42 AM	BCl3 valve closed
1/21/2011	11:33:42 AM	PH3 valve closed
1/21/2011	11:33:42 AM	SiCl4 pre valve closed
1/21/2011	11:33:42 AM	SiCl4 post valve closed
1/21/2011	11:33:42 AM	Main Vac valve closed
1/21/2011	11:33:42 AM	Bubbler valve closed
1/21/2011	11:33:42 AM	Bypass valve opened
1/21/2011	11:33:42 AM	Helium MFC set to  0.000000
1/21/2011	11:33:42 AM	H2 MFC set to  0.000000
1/21/2011	11:33:42 AM	BCl3 MFC set to  0.000000
1/21/2011	11:33:42 AM	PHl3 MFC set to  0.000000
1/21/2011	11:33:42 AM	SiCl4 MFC set to  0.000000
1/21/2011	11:33:42 AM	Bypass solenoid MFC set to  0.000000
1/21/2011	11:33:42 AM	Tube furnace set to 0
1/21/2011	11:34:12 AM	Helium valve closed
1/21/2011	11:34:12 AM	H2 valve closed
1/21/2011	11:34:12 AM	BCl3 valve closed
1/21/2011	11:34:12 AM	PH3 valve closed
1/21/2011	11:34:12 AM	SiCl4 pre valve closed
1/21/2011	11:34:12 AM	SiCl4 post valve closed
1/21/2011	11:34:12 AM	Bubbler valve closed
1/21/2011	11:34:12 AM	Main Vac valve opened
1/21/2011	11:34:12 AM	Bypass valve opened
1/21/2011	11:34:12 AM	Helium MFC set to  0.000000
1/21/2011	11:34:12 AM	H2 MFC set to  0.000000
1/21/2011	11:34:12 AM	BCl3 MFC set to  0.000000
1/21/2011	11:34:12 AM	PHl3 MFC set to  0.000000
1/21/2011	11:34:12 AM	SiCl4 MFC set to  0.000000
1/21/2011	11:34:12 AM	Bypass solenoid MFC set to  0.000000
1/21/2011	11:34:12 AM	Tube furnace set to 0
1/21/2011	11:34:13 AM	Run finished at 11:34 AM
1/21/2011	11:34:13 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/21/2011	11:35:09 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
1/21/2011	11:35:22 AM	Recipe started at 11:35 AM
1/21/2011	11:35:22 AM	Helium valve closed
1/21/2011	11:35:22 AM	H2 valve closed
1/21/2011	11:35:22 AM	BCl3 valve closed
1/21/2011	11:35:22 AM	PH3 valve closed
1/21/2011	11:35:22 AM	SiCl4 pre valve closed
1/21/2011	11:35:22 AM	SiCl4 post valve closed
1/21/2011	11:35:22 AM	Main Vac valve closed
1/21/2011	11:35:22 AM	Bubbler valve closed
1/21/2011	11:35:22 AM	Bypass valve opened
1/21/2011	11:35:22 AM	Helium MFC set to  0.000000
1/21/2011	11:35:22 AM	H2 MFC set to  0.000000
1/21/2011	11:35:22 AM	BCl3 MFC set to  0.000000
1/21/2011	11:35:22 AM	PHl3 MFC set to  0.000000
1/21/2011	11:35:22 AM	SiCl4 MFC set to  0.000000
1/21/2011	11:35:22 AM	Bypass solenoid MFC set to  0.000000
1/21/2011	11:35:22 AM	Tube furnace set to 0
1/21/2011	11:35:22 AM	Helium valve closed
1/21/2011	11:35:22 AM	H2 valve closed
1/21/2011	11:35:22 AM	BCl3 valve closed
1/21/2011	11:35:22 AM	PH3 valve closed
1/21/2011	11:35:22 AM	SiCl4 pre valve closed
1/21/2011	11:35:22 AM	SiCl4 post valve closed
1/21/2011	11:35:22 AM	Bubbler valve closed
1/21/2011	11:35:22 AM	Main Vac valve opened
1/21/2011	11:35:22 AM	Bypass valve opened
1/21/2011	11:35:22 AM	Helium MFC set to  0.000000
1/21/2011	11:35:22 AM	H2 MFC set to  0.000000
1/21/2011	11:35:22 AM	BCl3 MFC set to  0.000000
1/21/2011	11:35:22 AM	PHl3 MFC set to  0.000000
1/21/2011	11:35:22 AM	SiCl4 MFC set to  0.000000
1/21/2011	11:35:22 AM	Bypass solenoid MFC set to  0.000000
1/21/2011	11:35:22 AM	Tube furnace set to 0
1/21/2011	11:36:22 AM	H2 valve closed
1/21/2011	11:36:22 AM	BCl3 valve closed
1/21/2011	11:36:22 AM	PH3 valve closed
1/21/2011	11:36:22 AM	SiCl4 pre valve closed
1/21/2011	11:36:22 AM	SiCl4 post valve closed
1/21/2011	11:36:22 AM	Bubbler valve closed
1/21/2011	11:36:22 AM	Helium valve opened
1/21/2011	11:36:22 AM	Main Vac valve opened
1/21/2011	11:36:22 AM	Bypass valve opened
1/21/2011	11:36:22 AM	Helium MFC set to  100.000000
1/21/2011	11:36:22 AM	H2 MFC set to  0.000000
1/21/2011	11:36:22 AM	BCl3 MFC set to  0.000000
1/21/2011	11:36:22 AM	PHl3 MFC set to  0.000000
1/21/2011	11:36:22 AM	SiCl4 MFC set to  0.000000
1/21/2011	11:36:22 AM	Bypass solenoid MFC set to  0.000000
1/21/2011	11:36:22 AM	Tube furnace set to 0
1/21/2011	11:37:23 AM	Helium valve closed
1/21/2011	11:37:23 AM	H2 valve closed
1/21/2011	11:37:23 AM	BCl3 valve closed
1/21/2011	11:37:23 AM	PH3 valve closed
1/21/2011	11:37:23 AM	SiCl4 pre valve closed
1/21/2011	11:37:23 AM	SiCl4 post valve closed
1/21/2011	11:37:23 AM	Bubbler valve closed
1/21/2011	11:37:23 AM	Main Vac valve opened
1/21/2011	11:37:23 AM	Bypass valve opened
1/21/2011	11:37:23 AM	Helium MFC set to  0.000000
1/21/2011	11:37:23 AM	H2 MFC set to  0.000000
1/21/2011	11:37:23 AM	BCl3 MFC set to  0.000000
1/21/2011	11:37:23 AM	PHl3 MFC set to  0.000000
1/21/2011	11:37:23 AM	SiCl4 MFC set to  0.000000
1/21/2011	11:37:23 AM	Bypass solenoid MFC set to  0.000000
1/21/2011	11:37:23 AM	Tube furnace set to 0
1/21/2011	11:38:23 AM	H2 valve closed
1/21/2011	11:38:23 AM	BCl3 valve closed
1/21/2011	11:38:23 AM	PH3 valve closed
1/21/2011	11:38:23 AM	SiCl4 pre valve closed
1/21/2011	11:38:23 AM	SiCl4 post valve closed
1/21/2011	11:38:23 AM	Bubbler valve closed
1/21/2011	11:38:23 AM	Helium valve opened
1/21/2011	11:38:23 AM	Main Vac valve opened
1/21/2011	11:38:23 AM	Bypass valve opened
1/21/2011	11:38:23 AM	Helium MFC set to  100.000000
1/21/2011	11:38:23 AM	H2 MFC set to  0.000000
1/21/2011	11:38:23 AM	BCl3 MFC set to  0.000000
1/21/2011	11:38:23 AM	PHl3 MFC set to  0.000000
1/21/2011	11:38:23 AM	SiCl4 MFC set to  0.000000
1/21/2011	11:38:23 AM	Bypass solenoid MFC set to  0.000000
1/21/2011	11:38:23 AM	Tube furnace set to 0
1/21/2011	11:39:23 AM	Helium valve closed
1/21/2011	11:39:23 AM	H2 valve closed
1/21/2011	11:39:23 AM	BCl3 valve closed
1/21/2011	11:39:23 AM	PH3 valve closed
1/21/2011	11:39:23 AM	SiCl4 pre valve closed
1/21/2011	11:39:23 AM	SiCl4 post valve closed
1/21/2011	11:39:23 AM	Bubbler valve closed
1/21/2011	11:39:23 AM	Main Vac valve opened
1/21/2011	11:39:23 AM	Bypass valve opened
1/21/2011	11:39:23 AM	Helium MFC set to  0.000000
1/21/2011	11:39:23 AM	H2 MFC set to  0.000000
1/21/2011	11:39:23 AM	BCl3 MFC set to  0.000000
1/21/2011	11:39:23 AM	PHl3 MFC set to  0.000000
1/21/2011	11:39:23 AM	SiCl4 MFC set to  0.000000
1/21/2011	11:39:23 AM	Bypass solenoid MFC set to  0.000000
1/21/2011	11:39:23 AM	Tube furnace set to 0
1/21/2011	11:40:23 AM	H2 valve closed
1/21/2011	11:40:23 AM	BCl3 valve closed
1/21/2011	11:40:23 AM	PH3 valve closed
1/21/2011	11:40:23 AM	SiCl4 pre valve closed
1/21/2011	11:40:23 AM	SiCl4 post valve closed
1/21/2011	11:40:23 AM	Bubbler valve closed
1/21/2011	11:40:23 AM	Helium valve opened
1/21/2011	11:40:23 AM	Main Vac valve opened
1/21/2011	11:40:23 AM	Bypass valve opened
1/21/2011	11:40:23 AM	Helium MFC set to  100.000000
1/21/2011	11:40:23 AM	H2 MFC set to  0.000000
1/21/2011	11:40:23 AM	BCl3 MFC set to  0.000000
1/21/2011	11:40:23 AM	PHl3 MFC set to  0.000000
1/21/2011	11:40:23 AM	SiCl4 MFC set to  0.000000
1/21/2011	11:40:23 AM	Bypass solenoid MFC set to  0.000000
1/21/2011	11:40:23 AM	Tube furnace set to 0
1/21/2011	11:41:23 AM	Helium valve closed
1/21/2011	11:41:23 AM	H2 valve closed
1/21/2011	11:41:23 AM	BCl3 valve closed
1/21/2011	11:41:23 AM	PH3 valve closed
1/21/2011	11:41:23 AM	SiCl4 pre valve closed
1/21/2011	11:41:23 AM	SiCl4 post valve closed
1/21/2011	11:41:23 AM	Bubbler valve closed
1/21/2011	11:41:23 AM	Main Vac valve opened
1/21/2011	11:41:23 AM	Bypass valve opened
1/21/2011	11:41:23 AM	Helium MFC set to  0.000000
1/21/2011	11:41:23 AM	H2 MFC set to  0.000000
1/21/2011	11:41:23 AM	BCl3 MFC set to  0.000000
1/21/2011	11:41:23 AM	PHl3 MFC set to  0.000000
1/21/2011	11:41:23 AM	SiCl4 MFC set to  0.000000
1/21/2011	11:41:23 AM	Bypass solenoid MFC set to  0.000000
1/21/2011	11:41:23 AM	Tube furnace set to 0
1/21/2011	11:42:24 AM	H2 valve closed
1/21/2011	11:42:24 AM	BCl3 valve closed
1/21/2011	11:42:24 AM	PH3 valve closed
1/21/2011	11:42:24 AM	SiCl4 pre valve closed
1/21/2011	11:42:24 AM	SiCl4 post valve closed
1/21/2011	11:42:24 AM	Bubbler valve closed
1/21/2011	11:42:24 AM	Helium valve opened
1/21/2011	11:42:24 AM	Main Vac valve opened
1/21/2011	11:42:24 AM	Bypass valve opened
1/21/2011	11:42:24 AM	Helium MFC set to  100.000000
1/21/2011	11:42:24 AM	H2 MFC set to  0.000000
1/21/2011	11:42:24 AM	BCl3 MFC set to  0.000000
1/21/2011	11:42:24 AM	PHl3 MFC set to  0.000000
1/21/2011	11:42:24 AM	SiCl4 MFC set to  0.000000
1/21/2011	11:42:24 AM	Bypass solenoid MFC set to  0.000000
1/21/2011	11:42:24 AM	Tube furnace set to 0
1/21/2011	11:43:24 AM	Helium valve closed
1/21/2011	11:43:24 AM	H2 valve closed
1/21/2011	11:43:24 AM	BCl3 valve closed
1/21/2011	11:43:24 AM	PH3 valve closed
1/21/2011	11:43:24 AM	SiCl4 pre valve closed
1/21/2011	11:43:24 AM	SiCl4 post valve closed
1/21/2011	11:43:24 AM	Bubbler valve closed
1/21/2011	11:43:24 AM	Main Vac valve opened
1/21/2011	11:43:24 AM	Bypass valve opened
1/21/2011	11:43:24 AM	Helium MFC set to  0.000000
1/21/2011	11:43:24 AM	H2 MFC set to  0.000000
1/21/2011	11:43:24 AM	BCl3 MFC set to  0.000000
1/21/2011	11:43:24 AM	PHl3 MFC set to  0.000000
1/21/2011	11:43:24 AM	SiCl4 MFC set to  0.000000
1/21/2011	11:43:24 AM	Bypass solenoid MFC set to  0.000000
1/21/2011	11:43:24 AM	Tube furnace set to 0
1/21/2011	11:44:24 AM	H2 valve closed
1/21/2011	11:44:24 AM	BCl3 valve closed
1/21/2011	11:44:24 AM	PH3 valve closed
1/21/2011	11:44:24 AM	SiCl4 pre valve closed
1/21/2011	11:44:24 AM	SiCl4 post valve closed
1/21/2011	11:44:24 AM	Bubbler valve closed
1/21/2011	11:44:24 AM	Helium valve opened
1/21/2011	11:44:24 AM	Main Vac valve opened
1/21/2011	11:44:24 AM	Bypass valve opened
1/21/2011	11:44:24 AM	Helium MFC set to  100.000000
1/21/2011	11:44:24 AM	H2 MFC set to  0.000000
1/21/2011	11:44:24 AM	BCl3 MFC set to  0.000000
1/21/2011	11:44:24 AM	PHl3 MFC set to  0.000000
1/21/2011	11:44:24 AM	SiCl4 MFC set to  0.000000
1/21/2011	11:44:24 AM	Bypass solenoid MFC set to  0.000000
1/21/2011	11:44:24 AM	Tube furnace set to 0
1/21/2011	11:45:24 AM	Helium valve closed
1/21/2011	11:45:24 AM	H2 valve closed
1/21/2011	11:45:24 AM	BCl3 valve closed
1/21/2011	11:45:24 AM	PH3 valve closed
1/21/2011	11:45:24 AM	SiCl4 pre valve closed
1/21/2011	11:45:24 AM	SiCl4 post valve closed
1/21/2011	11:45:24 AM	Bubbler valve closed
1/21/2011	11:45:24 AM	Main Vac valve opened
1/21/2011	11:45:24 AM	Bypass valve opened
1/21/2011	11:45:24 AM	Helium MFC set to  0.000000
1/21/2011	11:45:24 AM	H2 MFC set to  0.000000
1/21/2011	11:45:24 AM	BCl3 MFC set to  0.000000
1/21/2011	11:45:24 AM	PHl3 MFC set to  0.000000
1/21/2011	11:45:24 AM	SiCl4 MFC set to  0.000000
1/21/2011	11:45:24 AM	Bypass solenoid MFC set to  0.000000
1/21/2011	11:45:24 AM	Tube furnace set to 0
1/21/2011	11:46:24 AM	H2 valve closed
1/21/2011	11:46:24 AM	BCl3 valve closed
1/21/2011	11:46:24 AM	PH3 valve closed
1/21/2011	11:46:24 AM	SiCl4 pre valve closed
1/21/2011	11:46:24 AM	SiCl4 post valve closed
1/21/2011	11:46:24 AM	Bubbler valve closed
1/21/2011	11:46:24 AM	Helium valve opened
1/21/2011	11:46:24 AM	Main Vac valve opened
1/21/2011	11:46:24 AM	Bypass valve opened
1/21/2011	11:46:24 AM	Helium MFC set to  100.000000
1/21/2011	11:46:24 AM	H2 MFC set to  0.000000
1/21/2011	11:46:24 AM	BCl3 MFC set to  0.000000
1/21/2011	11:46:24 AM	PHl3 MFC set to  0.000000
1/21/2011	11:46:24 AM	SiCl4 MFC set to  0.000000
1/21/2011	11:46:24 AM	Bypass solenoid MFC set to  0.000000
1/21/2011	11:46:25 AM	Tube furnace set to 0
1/21/2011	11:47:25 AM	Helium valve closed
1/21/2011	11:47:25 AM	H2 valve closed
1/21/2011	11:47:25 AM	BCl3 valve closed
1/21/2011	11:47:25 AM	PH3 valve closed
1/21/2011	11:47:25 AM	SiCl4 pre valve closed
1/21/2011	11:47:25 AM	SiCl4 post valve closed
1/21/2011	11:47:25 AM	Bubbler valve closed
1/21/2011	11:47:25 AM	Main Vac valve opened
1/21/2011	11:47:25 AM	Bypass valve opened
1/21/2011	11:47:25 AM	Helium MFC set to  0.000000
1/21/2011	11:47:25 AM	H2 MFC set to  0.000000
1/21/2011	11:47:25 AM	BCl3 MFC set to  0.000000
1/21/2011	11:47:25 AM	PHl3 MFC set to  0.000000
1/21/2011	11:47:25 AM	SiCl4 MFC set to  0.000000
1/21/2011	11:47:25 AM	Bypass solenoid MFC set to  0.000000
1/21/2011	11:47:25 AM	Tube furnace set to 0
1/21/2011	11:48:25 AM	H2 valve closed
1/21/2011	11:48:25 AM	BCl3 valve closed
1/21/2011	11:48:25 AM	PH3 valve closed
1/21/2011	11:48:25 AM	SiCl4 pre valve closed
1/21/2011	11:48:25 AM	SiCl4 post valve closed
1/21/2011	11:48:25 AM	Bubbler valve closed
1/21/2011	11:48:25 AM	Helium valve opened
1/21/2011	11:48:25 AM	Main Vac valve opened
1/21/2011	11:48:25 AM	Bypass valve opened
1/21/2011	11:48:25 AM	Helium MFC set to  100.000000
1/21/2011	11:48:25 AM	H2 MFC set to  0.000000
1/21/2011	11:48:25 AM	BCl3 MFC set to  0.000000
1/21/2011	11:48:25 AM	PHl3 MFC set to  0.000000
1/21/2011	11:48:25 AM	SiCl4 MFC set to  0.000000
1/21/2011	11:48:25 AM	Bypass solenoid MFC set to  0.000000
1/21/2011	11:48:25 AM	Tube furnace set to 0
1/21/2011	11:49:25 AM	Helium valve closed
1/21/2011	11:49:25 AM	H2 valve closed
1/21/2011	11:49:25 AM	BCl3 valve closed
1/21/2011	11:49:25 AM	PH3 valve closed
1/21/2011	11:49:25 AM	SiCl4 pre valve closed
1/21/2011	11:49:25 AM	SiCl4 post valve closed
1/21/2011	11:49:25 AM	Bubbler valve closed
1/21/2011	11:49:25 AM	Main Vac valve opened
1/21/2011	11:49:25 AM	Bypass valve opened
1/21/2011	11:49:25 AM	Helium MFC set to  0.000000
1/21/2011	11:49:25 AM	H2 MFC set to  0.000000
1/21/2011	11:49:25 AM	BCl3 MFC set to  0.000000
1/21/2011	11:49:25 AM	PHl3 MFC set to  0.000000
1/21/2011	11:49:25 AM	SiCl4 MFC set to  0.000000
1/21/2011	11:49:25 AM	Bypass solenoid MFC set to  0.000000
1/21/2011	11:49:25 AM	Tube furnace set to 0
1/21/2011	11:50:25 AM	H2 valve closed
1/21/2011	11:50:25 AM	BCl3 valve closed
1/21/2011	11:50:25 AM	PH3 valve closed
1/21/2011	11:50:25 AM	SiCl4 pre valve closed
1/21/2011	11:50:25 AM	SiCl4 post valve closed
1/21/2011	11:50:25 AM	Bubbler valve closed
1/21/2011	11:50:25 AM	Helium valve opened
1/21/2011	11:50:25 AM	Main Vac valve opened
1/21/2011	11:50:25 AM	Bypass valve opened
1/21/2011	11:50:25 AM	Helium MFC set to  100.000000
1/21/2011	11:50:25 AM	H2 MFC set to  0.000000
1/21/2011	11:50:25 AM	BCl3 MFC set to  0.000000
1/21/2011	11:50:25 AM	PHl3 MFC set to  0.000000
1/21/2011	11:50:25 AM	SiCl4 MFC set to  0.000000
1/21/2011	11:50:25 AM	Bypass solenoid MFC set to  0.000000
1/21/2011	11:50:25 AM	Tube furnace set to 0
1/21/2011	11:51:25 AM	Helium valve closed
1/21/2011	11:51:25 AM	H2 valve closed
1/21/2011	11:51:25 AM	BCl3 valve closed
1/21/2011	11:51:25 AM	PH3 valve closed
1/21/2011	11:51:25 AM	SiCl4 pre valve closed
1/21/2011	11:51:25 AM	SiCl4 post valve closed
1/21/2011	11:51:25 AM	Bubbler valve closed
1/21/2011	11:51:25 AM	Main Vac valve opened
1/21/2011	11:51:25 AM	Bypass valve opened
1/21/2011	11:51:25 AM	Helium MFC set to  0.000000
1/21/2011	11:51:25 AM	H2 MFC set to  0.000000
1/21/2011	11:51:25 AM	BCl3 MFC set to  0.000000
1/21/2011	11:51:25 AM	PHl3 MFC set to  0.000000
1/21/2011	11:51:25 AM	SiCl4 MFC set to  0.000000
1/21/2011	11:51:25 AM	Bypass solenoid MFC set to  0.000000
1/21/2011	11:51:26 AM	Tube furnace set to 0
1/21/2011	11:52:26 AM	H2 valve closed
1/21/2011	11:52:26 AM	BCl3 valve closed
1/21/2011	11:52:26 AM	PH3 valve closed
1/21/2011	11:52:26 AM	SiCl4 pre valve closed
1/21/2011	11:52:26 AM	SiCl4 post valve closed
1/21/2011	11:52:26 AM	Bubbler valve closed
1/21/2011	11:52:26 AM	Helium valve opened
1/21/2011	11:52:26 AM	Main Vac valve opened
1/21/2011	11:52:26 AM	Bypass valve opened
1/21/2011	11:52:26 AM	Helium MFC set to  100.000000
1/21/2011	11:52:26 AM	H2 MFC set to  0.000000
1/21/2011	11:52:26 AM	BCl3 MFC set to  0.000000
1/21/2011	11:52:26 AM	PHl3 MFC set to  0.000000
1/21/2011	11:52:26 AM	SiCl4 MFC set to  0.000000
1/21/2011	11:52:26 AM	Bypass solenoid MFC set to  0.000000
1/21/2011	11:52:26 AM	Tube furnace set to 0
1/21/2011	11:53:26 AM	Helium valve closed
1/21/2011	11:53:26 AM	H2 valve closed
1/21/2011	11:53:26 AM	BCl3 valve closed
1/21/2011	11:53:26 AM	PH3 valve closed
1/21/2011	11:53:26 AM	SiCl4 pre valve closed
1/21/2011	11:53:26 AM	SiCl4 post valve closed
1/21/2011	11:53:26 AM	Bubbler valve closed
1/21/2011	11:53:26 AM	Main Vac valve opened
1/21/2011	11:53:26 AM	Bypass valve opened
1/21/2011	11:53:26 AM	Helium MFC set to  0.000000
1/21/2011	11:53:26 AM	H2 MFC set to  0.000000
1/21/2011	11:53:26 AM	BCl3 MFC set to  0.000000
1/21/2011	11:53:26 AM	PHl3 MFC set to  0.000000
1/21/2011	11:53:26 AM	SiCl4 MFC set to  0.000000
1/21/2011	11:53:26 AM	Bypass solenoid MFC set to  0.000000
1/21/2011	11:53:26 AM	Tube furnace set to 0
1/21/2011	11:54:26 AM	H2 valve closed
1/21/2011	11:54:26 AM	BCl3 valve closed
1/21/2011	11:54:26 AM	PH3 valve closed
1/21/2011	11:54:26 AM	SiCl4 pre valve closed
1/21/2011	11:54:26 AM	SiCl4 post valve closed
1/21/2011	11:54:26 AM	Bubbler valve closed
1/21/2011	11:54:26 AM	Helium valve opened
1/21/2011	11:54:26 AM	Main Vac valve opened
1/21/2011	11:54:26 AM	Bypass valve opened
1/21/2011	11:54:26 AM	Helium MFC set to  100.000000
1/21/2011	11:54:26 AM	H2 MFC set to  0.000000
1/21/2011	11:54:26 AM	BCl3 MFC set to  0.000000
1/21/2011	11:54:26 AM	PHl3 MFC set to  0.000000
1/21/2011	11:54:26 AM	SiCl4 MFC set to  0.000000
1/21/2011	11:54:26 AM	Bypass solenoid MFC set to  0.000000
1/21/2011	11:54:26 AM	Tube furnace set to 0
1/21/2011	11:55:26 AM	Helium valve closed
1/21/2011	11:55:26 AM	H2 valve closed
1/21/2011	11:55:26 AM	BCl3 valve closed
1/21/2011	11:55:26 AM	PH3 valve closed
1/21/2011	11:55:26 AM	SiCl4 pre valve closed
1/21/2011	11:55:26 AM	SiCl4 post valve closed
1/21/2011	11:55:26 AM	Bubbler valve closed
1/21/2011	11:55:26 AM	Main Vac valve opened
1/21/2011	11:55:26 AM	Bypass valve opened
1/21/2011	11:55:26 AM	Helium MFC set to  0.000000
1/21/2011	11:55:26 AM	H2 MFC set to  0.000000
1/21/2011	11:55:26 AM	BCl3 MFC set to  0.000000
1/21/2011	11:55:26 AM	PHl3 MFC set to  0.000000
1/21/2011	11:55:26 AM	SiCl4 MFC set to  0.000000
1/21/2011	11:55:26 AM	Bypass solenoid MFC set to  0.000000
1/21/2011	11:55:26 AM	Tube furnace set to 0
1/21/2011	11:55:27 AM	Run finished at 11:55 AM
1/21/2011	11:55:27 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
1/21/2011	11:57:09 AM	Bypass valve closed
1/21/2011	11:57:09 AM	Main Vac valve closed
1/21/2011	11:57:17 AM	Bypass valve opened
1/21/2011	11:57:17 AM	Main Vac valve opened
1/21/2011	11:57:21 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
1/21/2011	11:57:35 AM	Recipe started at 11:57 AM
1/21/2011	11:57:35 AM	Helium valve closed
1/21/2011	11:57:35 AM	H2 valve closed
1/21/2011	11:57:35 AM	BCl3 valve closed
1/21/2011	11:57:35 AM	PH3 valve closed
1/21/2011	11:57:35 AM	SiCl4 pre valve closed
1/21/2011	11:57:35 AM	SiCl4 post valve closed
1/21/2011	11:57:35 AM	Main Vac valve closed
1/21/2011	11:57:35 AM	Bubbler valve closed
1/21/2011	11:57:35 AM	Bypass valve opened
1/21/2011	11:57:35 AM	Helium MFC set to  0.000000
1/21/2011	11:57:35 AM	H2 MFC set to  0.000000
1/21/2011	11:57:35 AM	BCl3 MFC set to  0.000000
1/21/2011	11:57:35 AM	PHl3 MFC set to  0.000000
1/21/2011	11:57:35 AM	SiCl4 MFC set to  0.000000
1/21/2011	11:57:35 AM	Bypass solenoid MFC set to  0.000000
1/21/2011	11:57:35 AM	Tube furnace set to 0
1/21/2011	11:57:35 AM	Helium valve closed
1/21/2011	11:57:35 AM	H2 valve closed
1/21/2011	11:57:35 AM	BCl3 valve closed
1/21/2011	11:57:35 AM	PH3 valve closed
1/21/2011	11:57:35 AM	SiCl4 pre valve closed
1/21/2011	11:57:35 AM	SiCl4 post valve closed
1/21/2011	11:57:35 AM	Bubbler valve closed
1/21/2011	11:57:35 AM	Main Vac valve opened
1/21/2011	11:57:35 AM	Bypass valve opened
1/21/2011	11:57:35 AM	Helium MFC set to  0.000000
1/21/2011	11:57:35 AM	H2 MFC set to  0.000000
1/21/2011	11:57:35 AM	BCl3 MFC set to  0.000000
1/21/2011	11:57:35 AM	PHl3 MFC set to  0.000000
1/21/2011	11:57:35 AM	SiCl4 MFC set to  0.000000
1/21/2011	11:57:35 AM	Bypass solenoid MFC set to  0.000000
1/21/2011	11:57:35 AM	Tube furnace set to 0
1/21/2011	11:57:36 AM	H2 valve closed
1/21/2011	11:57:36 AM	BCl3 valve closed
1/21/2011	11:57:36 AM	PH3 valve closed
1/21/2011	11:57:36 AM	SiCl4 pre valve closed
1/21/2011	11:57:36 AM	SiCl4 post valve closed
1/21/2011	11:57:36 AM	Bubbler valve closed
1/21/2011	11:57:36 AM	Helium valve opened
1/21/2011	11:57:36 AM	Main Vac valve opened
1/21/2011	11:57:36 AM	Bypass valve opened
1/21/2011	11:57:36 AM	Helium MFC set to  100.000000
1/21/2011	11:57:36 AM	H2 MFC set to  0.000000
1/21/2011	11:57:36 AM	BCl3 MFC set to  0.000000
1/21/2011	11:57:36 AM	PHl3 MFC set to  0.000000
1/21/2011	11:57:36 AM	SiCl4 MFC set to  0.000000
1/21/2011	11:57:36 AM	Bypass solenoid MFC set to  0.000000
1/21/2011	11:57:36 AM	Tube furnace set to 0
1/21/2011	11:57:37 AM	Helium valve closed
1/21/2011	11:57:37 AM	H2 valve closed
1/21/2011	11:57:37 AM	BCl3 valve closed
1/21/2011	11:57:37 AM	PH3 valve closed
1/21/2011	11:57:37 AM	SiCl4 pre valve closed
1/21/2011	11:57:37 AM	SiCl4 post valve closed
1/21/2011	11:57:37 AM	Bubbler valve closed
1/21/2011	11:57:37 AM	Main Vac valve opened
1/21/2011	11:57:37 AM	Bypass valve opened
1/21/2011	11:57:37 AM	Helium MFC set to  0.000000
1/21/2011	11:57:37 AM	H2 MFC set to  0.000000
1/21/2011	11:57:37 AM	BCl3 MFC set to  0.000000
1/21/2011	11:57:37 AM	PHl3 MFC set to  0.000000
1/21/2011	11:57:37 AM	SiCl4 MFC set to  0.000000
1/21/2011	11:57:37 AM	Bypass solenoid MFC set to  0.000000
1/21/2011	11:57:37 AM	Tube furnace set to 0
1/21/2011	11:57:43 AM	H2 valve closed
1/21/2011	11:57:43 AM	BCl3 valve closed
1/21/2011	11:57:43 AM	PH3 valve closed
1/21/2011	11:57:43 AM	SiCl4 pre valve closed
1/21/2011	11:57:43 AM	SiCl4 post valve closed
1/21/2011	11:57:43 AM	Bubbler valve closed
1/21/2011	11:57:43 AM	Helium valve opened
1/21/2011	11:57:43 AM	Main Vac valve opened
1/21/2011	11:57:43 AM	Bypass valve opened
1/21/2011	11:57:43 AM	Helium MFC set to  100.000000
1/21/2011	11:57:43 AM	H2 MFC set to  0.000000
1/21/2011	11:57:43 AM	BCl3 MFC set to  0.000000
1/21/2011	11:57:43 AM	PHl3 MFC set to  0.000000
1/21/2011	11:57:43 AM	SiCl4 MFC set to  0.000000
1/21/2011	11:57:44 AM	Bypass solenoid MFC set to  0.000000
1/21/2011	11:57:44 AM	Tube furnace set to 0
1/21/2011	11:57:44 AM	Helium valve closed
1/21/2011	11:57:44 AM	H2 valve closed
1/21/2011	11:57:44 AM	BCl3 valve closed
1/21/2011	11:57:44 AM	PH3 valve closed
1/21/2011	11:57:44 AM	SiCl4 pre valve closed
1/21/2011	11:57:44 AM	SiCl4 post valve closed
1/21/2011	11:57:44 AM	Bubbler valve closed
1/21/2011	11:57:44 AM	Main Vac valve opened
1/21/2011	11:57:44 AM	Bypass valve opened
1/21/2011	11:57:44 AM	Helium MFC set to  0.000000
1/21/2011	11:57:44 AM	H2 MFC set to  0.000000
1/21/2011	11:57:44 AM	BCl3 MFC set to  0.000000
1/21/2011	11:57:44 AM	PHl3 MFC set to  0.000000
1/21/2011	11:57:44 AM	SiCl4 MFC set to  0.000000
1/21/2011	11:57:44 AM	Bypass solenoid MFC set to  0.000000
1/21/2011	11:57:45 AM	Tube furnace set to 0
1/21/2011	11:57:47 AM	H2 valve closed
1/21/2011	11:57:47 AM	BCl3 valve closed
1/21/2011	11:57:47 AM	PH3 valve closed
1/21/2011	11:57:47 AM	SiCl4 pre valve closed
1/21/2011	11:57:47 AM	SiCl4 post valve closed
1/21/2011	11:57:47 AM	Bubbler valve closed
1/21/2011	11:57:47 AM	Helium valve opened
1/21/2011	11:57:47 AM	Main Vac valve opened
1/21/2011	11:57:47 AM	Bypass valve opened
1/21/2011	11:57:47 AM	Helium MFC set to  100.000000
1/21/2011	11:57:47 AM	H2 MFC set to  0.000000
1/21/2011	11:57:47 AM	BCl3 MFC set to  0.000000
1/21/2011	11:57:47 AM	PHl3 MFC set to  0.000000
1/21/2011	11:57:47 AM	SiCl4 MFC set to  0.000000
1/21/2011	11:57:47 AM	Bypass solenoid MFC set to  0.000000
1/21/2011	11:57:47 AM	Tube furnace set to 0
1/21/2011	11:57:47 AM	Helium valve closed
1/21/2011	11:57:47 AM	H2 valve closed
1/21/2011	11:57:47 AM	BCl3 valve closed
1/21/2011	11:57:47 AM	PH3 valve closed
1/21/2011	11:57:47 AM	SiCl4 pre valve closed
1/21/2011	11:57:47 AM	SiCl4 post valve closed
1/21/2011	11:57:47 AM	Bubbler valve closed
1/21/2011	11:57:47 AM	Main Vac valve opened
1/21/2011	11:57:47 AM	Bypass valve opened
1/21/2011	11:57:47 AM	Helium MFC set to  0.000000
1/21/2011	11:57:47 AM	H2 MFC set to  0.000000
1/21/2011	11:57:47 AM	BCl3 MFC set to  0.000000
1/21/2011	11:57:47 AM	PHl3 MFC set to  0.000000
1/21/2011	11:57:47 AM	SiCl4 MFC set to  0.000000
1/21/2011	11:57:47 AM	Bypass solenoid MFC set to  0.000000
1/21/2011	11:57:48 AM	Tube furnace set to 0
1/21/2011	11:57:48 AM	H2 valve closed
1/21/2011	11:57:48 AM	BCl3 valve closed
1/21/2011	11:57:48 AM	PH3 valve closed
1/21/2011	11:57:48 AM	SiCl4 pre valve closed
1/21/2011	11:57:48 AM	SiCl4 post valve closed
1/21/2011	11:57:48 AM	Bubbler valve closed
1/21/2011	11:57:48 AM	Helium valve opened
1/21/2011	11:57:48 AM	Main Vac valve opened
1/21/2011	11:57:48 AM	Bypass valve opened
1/21/2011	11:57:48 AM	Helium MFC set to  100.000000
1/21/2011	11:57:48 AM	H2 MFC set to  0.000000
1/21/2011	11:57:48 AM	BCl3 MFC set to  0.000000
1/21/2011	11:57:48 AM	PHl3 MFC set to  0.000000
1/21/2011	11:57:48 AM	SiCl4 MFC set to  0.000000
1/21/2011	11:57:48 AM	Bypass solenoid MFC set to  0.000000
1/21/2011	11:57:48 AM	Tube furnace set to 0
1/21/2011	11:57:49 AM	Helium valve closed
1/21/2011	11:57:49 AM	H2 valve closed
1/21/2011	11:57:49 AM	BCl3 valve closed
1/21/2011	11:57:49 AM	PH3 valve closed
1/21/2011	11:57:49 AM	SiCl4 pre valve closed
1/21/2011	11:57:49 AM	SiCl4 post valve closed
1/21/2011	11:57:49 AM	Bubbler valve closed
1/21/2011	11:57:49 AM	Main Vac valve opened
1/21/2011	11:57:49 AM	Bypass valve opened
1/21/2011	11:57:49 AM	Helium MFC set to  0.000000
1/21/2011	11:57:49 AM	H2 MFC set to  0.000000
1/21/2011	11:57:49 AM	BCl3 MFC set to  0.000000
1/21/2011	11:57:49 AM	PHl3 MFC set to  0.000000
1/21/2011	11:57:49 AM	SiCl4 MFC set to  0.000000
1/21/2011	11:57:49 AM	Bypass solenoid MFC set to  0.000000
1/21/2011	11:57:49 AM	Tube furnace set to 0
1/21/2011	11:57:49 AM	H2 valve closed
1/21/2011	11:57:49 AM	BCl3 valve closed
1/21/2011	11:57:49 AM	PH3 valve closed
1/21/2011	11:57:49 AM	SiCl4 pre valve closed
1/21/2011	11:57:49 AM	SiCl4 post valve closed
1/21/2011	11:57:49 AM	Bubbler valve closed
1/21/2011	11:57:49 AM	Helium valve opened
1/21/2011	11:57:49 AM	Main Vac valve opened
1/21/2011	11:57:49 AM	Bypass valve opened
1/21/2011	11:57:49 AM	Helium MFC set to  100.000000
1/21/2011	11:57:49 AM	H2 MFC set to  0.000000
1/21/2011	11:57:49 AM	BCl3 MFC set to  0.000000
1/21/2011	11:57:49 AM	PHl3 MFC set to  0.000000
1/21/2011	11:57:49 AM	SiCl4 MFC set to  0.000000
1/21/2011	11:57:49 AM	Bypass solenoid MFC set to  0.000000
1/21/2011	11:57:50 AM	Tube furnace set to 0
1/21/2011	11:57:50 AM	Helium valve closed
1/21/2011	11:57:50 AM	H2 valve closed
1/21/2011	11:57:50 AM	BCl3 valve closed
1/21/2011	11:57:50 AM	PH3 valve closed
1/21/2011	11:57:50 AM	SiCl4 pre valve closed
1/21/2011	11:57:50 AM	SiCl4 post valve closed
1/21/2011	11:57:50 AM	Bubbler valve closed
1/21/2011	11:57:50 AM	Main Vac valve opened
1/21/2011	11:57:50 AM	Bypass valve opened
1/21/2011	11:57:50 AM	Helium MFC set to  0.000000
1/21/2011	11:57:50 AM	H2 MFC set to  0.000000
1/21/2011	11:57:50 AM	BCl3 MFC set to  0.000000
1/21/2011	11:57:50 AM	PHl3 MFC set to  0.000000
1/21/2011	11:57:50 AM	SiCl4 MFC set to  0.000000
1/21/2011	11:57:50 AM	Bypass solenoid MFC set to  0.000000
1/21/2011	11:57:51 AM	Tube furnace set to 0
1/21/2011	11:58:51 AM	H2 valve closed
1/21/2011	11:58:51 AM	BCl3 valve closed
1/21/2011	11:58:51 AM	PH3 valve closed
1/21/2011	11:58:51 AM	SiCl4 pre valve closed
1/21/2011	11:58:51 AM	SiCl4 post valve closed
1/21/2011	11:58:51 AM	Bubbler valve closed
1/21/2011	11:58:51 AM	Helium valve opened
1/21/2011	11:58:51 AM	Main Vac valve opened
1/21/2011	11:58:51 AM	Bypass valve opened
1/21/2011	11:58:51 AM	Helium MFC set to  100.000000
1/21/2011	11:58:51 AM	H2 MFC set to  0.000000
1/21/2011	11:58:51 AM	BCl3 MFC set to  0.000000
1/21/2011	11:58:51 AM	PHl3 MFC set to  0.000000
1/21/2011	11:58:51 AM	SiCl4 MFC set to  0.000000
1/21/2011	11:58:51 AM	Bypass solenoid MFC set to  0.000000
1/21/2011	11:58:51 AM	Tube furnace set to 0
1/21/2011	11:59:51 AM	Helium valve closed
1/21/2011	11:59:51 AM	H2 valve closed
1/21/2011	11:59:51 AM	BCl3 valve closed
1/21/2011	11:59:51 AM	PH3 valve closed
1/21/2011	11:59:51 AM	SiCl4 pre valve closed
1/21/2011	11:59:51 AM	SiCl4 post valve closed
1/21/2011	11:59:51 AM	Bubbler valve closed
1/21/2011	11:59:51 AM	Main Vac valve opened
1/21/2011	11:59:51 AM	Bypass valve opened
1/21/2011	11:59:51 AM	Helium MFC set to  0.000000
1/21/2011	11:59:51 AM	H2 MFC set to  0.000000
1/21/2011	11:59:51 AM	BCl3 MFC set to  0.000000
1/21/2011	11:59:51 AM	PHl3 MFC set to  0.000000
1/21/2011	11:59:51 AM	SiCl4 MFC set to  0.000000
1/21/2011	11:59:51 AM	Bypass solenoid MFC set to  0.000000
1/21/2011	11:59:51 AM	Tube furnace set to 0
1/21/2011	12:00:51 PM	H2 valve closed
1/21/2011	12:00:51 PM	BCl3 valve closed
1/21/2011	12:00:51 PM	PH3 valve closed
1/21/2011	12:00:51 PM	SiCl4 pre valve closed
1/21/2011	12:00:51 PM	SiCl4 post valve closed
1/21/2011	12:00:51 PM	Bubbler valve closed
1/21/2011	12:00:51 PM	Helium valve opened
1/21/2011	12:00:51 PM	Main Vac valve opened
1/21/2011	12:00:51 PM	Bypass valve opened
1/21/2011	12:00:51 PM	Helium MFC set to  100.000000
1/21/2011	12:00:51 PM	H2 MFC set to  0.000000
1/21/2011	12:00:51 PM	BCl3 MFC set to  0.000000
1/21/2011	12:00:51 PM	PHl3 MFC set to  0.000000
1/21/2011	12:00:51 PM	SiCl4 MFC set to  0.000000
1/21/2011	12:00:51 PM	Bypass solenoid MFC set to  0.000000
1/21/2011	12:00:51 PM	Tube furnace set to 0
1/21/2011	12:01:51 PM	Helium valve closed
1/21/2011	12:01:51 PM	H2 valve closed
1/21/2011	12:01:51 PM	BCl3 valve closed
1/21/2011	12:01:51 PM	PH3 valve closed
1/21/2011	12:01:51 PM	SiCl4 pre valve closed
1/21/2011	12:01:51 PM	SiCl4 post valve closed
1/21/2011	12:01:51 PM	Bubbler valve closed
1/21/2011	12:01:51 PM	Main Vac valve opened
1/21/2011	12:01:51 PM	Bypass valve opened
1/21/2011	12:01:51 PM	Helium MFC set to  0.000000
1/21/2011	12:01:51 PM	H2 MFC set to  0.000000
1/21/2011	12:01:51 PM	BCl3 MFC set to  0.000000
1/21/2011	12:01:51 PM	PHl3 MFC set to  0.000000
1/21/2011	12:01:51 PM	SiCl4 MFC set to  0.000000
1/21/2011	12:01:51 PM	Bypass solenoid MFC set to  0.000000
1/21/2011	12:01:51 PM	Tube furnace set to 0
1/21/2011	12:02:51 PM	H2 valve closed
1/21/2011	12:02:51 PM	BCl3 valve closed
1/21/2011	12:02:51 PM	PH3 valve closed
1/21/2011	12:02:51 PM	SiCl4 pre valve closed
1/21/2011	12:02:51 PM	SiCl4 post valve closed
1/21/2011	12:02:51 PM	Bubbler valve closed
1/21/2011	12:02:51 PM	Helium valve opened
1/21/2011	12:02:51 PM	Main Vac valve opened
1/21/2011	12:02:51 PM	Bypass valve opened
1/21/2011	12:02:51 PM	Helium MFC set to  100.000000
1/21/2011	12:02:51 PM	H2 MFC set to  0.000000
1/21/2011	12:02:51 PM	BCl3 MFC set to  0.000000
1/21/2011	12:02:51 PM	PHl3 MFC set to  0.000000
1/21/2011	12:02:51 PM	SiCl4 MFC set to  0.000000
1/21/2011	12:02:51 PM	Bypass solenoid MFC set to  0.000000
1/21/2011	12:02:52 PM	Tube furnace set to 0
1/21/2011	12:03:52 PM	Helium valve closed
1/21/2011	12:03:52 PM	H2 valve closed
1/21/2011	12:03:52 PM	BCl3 valve closed
1/21/2011	12:03:52 PM	PH3 valve closed
1/21/2011	12:03:52 PM	SiCl4 pre valve closed
1/21/2011	12:03:52 PM	SiCl4 post valve closed
1/21/2011	12:03:52 PM	Bubbler valve closed
1/21/2011	12:03:52 PM	Main Vac valve opened
1/21/2011	12:03:52 PM	Bypass valve opened
1/21/2011	12:03:52 PM	Helium MFC set to  0.000000
1/21/2011	12:03:52 PM	H2 MFC set to  0.000000
1/21/2011	12:03:52 PM	BCl3 MFC set to  0.000000
1/21/2011	12:03:52 PM	PHl3 MFC set to  0.000000
1/21/2011	12:03:52 PM	SiCl4 MFC set to  0.000000
1/21/2011	12:03:52 PM	Bypass solenoid MFC set to  0.000000
1/21/2011	12:03:52 PM	Tube furnace set to 0
1/21/2011	12:04:52 PM	H2 valve closed
1/21/2011	12:04:52 PM	BCl3 valve closed
1/21/2011	12:04:52 PM	PH3 valve closed
1/21/2011	12:04:52 PM	SiCl4 pre valve closed
1/21/2011	12:04:52 PM	SiCl4 post valve closed
1/21/2011	12:04:52 PM	Bubbler valve closed
1/21/2011	12:04:52 PM	Helium valve opened
1/21/2011	12:04:52 PM	Main Vac valve opened
1/21/2011	12:04:52 PM	Bypass valve opened
1/21/2011	12:04:52 PM	Helium MFC set to  100.000000
1/21/2011	12:04:52 PM	H2 MFC set to  0.000000
1/21/2011	12:04:52 PM	BCl3 MFC set to  0.000000
1/21/2011	12:04:52 PM	PHl3 MFC set to  0.000000
1/21/2011	12:04:52 PM	SiCl4 MFC set to  0.000000
1/21/2011	12:04:52 PM	Bypass solenoid MFC set to  0.000000
1/21/2011	12:04:52 PM	Tube furnace set to 0
1/21/2011	12:05:52 PM	Helium valve closed
1/21/2011	12:05:52 PM	H2 valve closed
1/21/2011	12:05:52 PM	BCl3 valve closed
1/21/2011	12:05:52 PM	PH3 valve closed
1/21/2011	12:05:52 PM	SiCl4 pre valve closed
1/21/2011	12:05:52 PM	SiCl4 post valve closed
1/21/2011	12:05:52 PM	Bubbler valve closed
1/21/2011	12:05:52 PM	Main Vac valve opened
1/21/2011	12:05:52 PM	Bypass valve opened
1/21/2011	12:05:52 PM	Helium MFC set to  0.000000
1/21/2011	12:05:52 PM	H2 MFC set to  0.000000
1/21/2011	12:05:52 PM	BCl3 MFC set to  0.000000
1/21/2011	12:05:52 PM	PHl3 MFC set to  0.000000
1/21/2011	12:05:52 PM	SiCl4 MFC set to  0.000000
1/21/2011	12:05:52 PM	Bypass solenoid MFC set to  0.000000
1/21/2011	12:05:52 PM	Tube furnace set to 0
1/21/2011	12:06:52 PM	H2 valve closed
1/21/2011	12:06:52 PM	BCl3 valve closed
1/21/2011	12:06:52 PM	PH3 valve closed
1/21/2011	12:06:52 PM	SiCl4 pre valve closed
1/21/2011	12:06:52 PM	SiCl4 post valve closed
1/21/2011	12:06:52 PM	Bubbler valve closed
1/21/2011	12:06:52 PM	Helium valve opened
1/21/2011	12:06:52 PM	Main Vac valve opened
1/21/2011	12:06:52 PM	Bypass valve opened
1/21/2011	12:06:52 PM	Helium MFC set to  100.000000
1/21/2011	12:06:52 PM	H2 MFC set to  0.000000
1/21/2011	12:06:52 PM	BCl3 MFC set to  0.000000
1/21/2011	12:06:52 PM	PHl3 MFC set to  0.000000
1/21/2011	12:06:52 PM	SiCl4 MFC set to  0.000000
1/21/2011	12:06:52 PM	Bypass solenoid MFC set to  0.000000
1/21/2011	12:06:52 PM	Tube furnace set to 0
1/21/2011	12:07:52 PM	Helium valve closed
1/21/2011	12:07:52 PM	H2 valve closed
1/21/2011	12:07:52 PM	BCl3 valve closed
1/21/2011	12:07:52 PM	PH3 valve closed
1/21/2011	12:07:52 PM	SiCl4 pre valve closed
1/21/2011	12:07:52 PM	SiCl4 post valve closed
1/21/2011	12:07:52 PM	Bubbler valve closed
1/21/2011	12:07:52 PM	Main Vac valve opened
1/21/2011	12:07:52 PM	Bypass valve opened
1/21/2011	12:07:52 PM	Helium MFC set to  0.000000
1/21/2011	12:07:52 PM	H2 MFC set to  0.000000
1/21/2011	12:07:52 PM	BCl3 MFC set to  0.000000
1/21/2011	12:07:52 PM	PHl3 MFC set to  0.000000
1/21/2011	12:07:52 PM	SiCl4 MFC set to  0.000000
1/21/2011	12:07:52 PM	Bypass solenoid MFC set to  0.000000
1/21/2011	12:07:53 PM	Tube furnace set to 0
1/21/2011	12:07:54 PM	Run finished at 12:07 PM
1/21/2011	12:07:54 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
1/21/2011	12:13:03 PM	Recipe started at 12:13 PM
1/21/2011	12:13:03 PM	Helium valve closed
1/21/2011	12:13:03 PM	BCl3 valve closed
1/21/2011	12:13:03 PM	PH3 valve closed
1/21/2011	12:13:03 PM	SiCl4 pre valve closed
1/21/2011	12:13:03 PM	SiCl4 post valve closed
1/21/2011	12:13:03 PM	Main Vac valve closed
1/21/2011	12:13:03 PM	Bypass valve closed
1/21/2011	12:13:03 PM	Bubbler valve closed
1/21/2011	12:13:03 PM	H2 valve opened
1/21/2011	12:13:03 PM	Helium MFC set to  0.000000
1/21/2011	12:13:03 PM	H2 MFC set to  500.000000
1/21/2011	12:13:03 PM	BCl3 MFC set to  0.000000
1/21/2011	12:13:03 PM	PHl3 MFC set to  0.000000
1/21/2011	12:13:03 PM	SiCl4 MFC set to  0.000000
1/21/2011	12:13:03 PM	Bypass solenoid MFC set to  0.000000
1/21/2011	12:13:03 PM	Tube furnace set to 0
1/21/2011	12:14:20 PM	Helium valve closed
1/21/2011	12:14:20 PM	BCl3 valve closed
1/21/2011	12:14:20 PM	PH3 valve closed
1/21/2011	12:14:20 PM	SiCl4 pre valve closed
1/21/2011	12:14:20 PM	SiCl4 post valve closed
1/21/2011	12:14:20 PM	Main Vac valve closed
1/21/2011	12:14:20 PM	Bypass valve closed
1/21/2011	12:14:20 PM	H2 valve opened
1/21/2011	12:14:20 PM	Bubbler valve opened
1/21/2011	12:14:20 PM	Helium MFC set to  0.000000
1/21/2011	12:14:20 PM	H2 MFC set to  500.000000
1/21/2011	12:14:20 PM	BCl3 MFC set to  0.000000
1/21/2011	12:14:20 PM	PHl3 MFC set to  0.000000
1/21/2011	12:14:20 PM	SiCl4 MFC set to  0.000000
1/21/2011	12:14:20 PM	Bypass solenoid MFC set to  0.000000
1/21/2011	12:14:20 PM	Tube furnace set to 1000
1/21/2011	12:34:20 PM	Helium valve closed
1/21/2011	12:34:20 PM	BCl3 valve closed
1/21/2011	12:34:20 PM	Main Vac valve closed
1/21/2011	12:34:20 PM	Bypass valve closed
1/21/2011	12:34:20 PM	H2 valve opened
1/21/2011	12:34:20 PM	PH3 valve opened
1/21/2011	12:34:20 PM	SiCl4 pre valve opened
1/21/2011	12:34:20 PM	SiCl4 post valve opened
1/21/2011	12:34:20 PM	Bubbler valve opened
1/21/2011	12:34:20 PM	Helium MFC set to  0.000000
1/21/2011	12:34:20 PM	H2 MFC set to  500.000000
1/21/2011	12:34:20 PM	BCl3 MFC set to  0.000000
1/21/2011	12:34:20 PM	PHl3 MFC set to  0.200000
1/21/2011	12:34:20 PM	SiCl4 MFC set to  50.000000
1/21/2011	12:34:20 PM	Bypass solenoid MFC set to  0.000000
1/21/2011	12:34:21 PM	Tube furnace set to 1000
1/21/2011	12:51:21 PM	H2 valve closed
1/21/2011	12:51:21 PM	BCl3 valve closed
1/21/2011	12:51:21 PM	PH3 valve closed
1/21/2011	12:51:21 PM	SiCl4 pre valve closed
1/21/2011	12:51:21 PM	SiCl4 post valve closed
1/21/2011	12:51:21 PM	Main Vac valve closed
1/21/2011	12:51:21 PM	Bypass valve closed
1/21/2011	12:51:21 PM	Helium valve opened
1/21/2011	12:51:21 PM	Bubbler valve opened
1/21/2011	12:51:21 PM	Helium MFC set to  500.000000
1/21/2011	12:51:21 PM	H2 MFC set to  0.000000
1/21/2011	12:51:21 PM	BCl3 MFC set to  0.000000
1/21/2011	12:51:21 PM	PHl3 MFC set to  0.000000
1/21/2011	12:51:21 PM	SiCl4 MFC set to  0.000000
1/21/2011	12:51:21 PM	Bypass solenoid MFC set to  0.000000
1/21/2011	12:51:21 PM	Tube furnace set to 0
1/21/2011	1:11:21 PM	Helium valve closed
1/21/2011	1:11:21 PM	H2 valve closed
1/21/2011	1:11:21 PM	BCl3 valve closed
1/21/2011	1:11:21 PM	PH3 valve closed
1/21/2011	1:11:21 PM	SiCl4 pre valve closed
1/21/2011	1:11:21 PM	SiCl4 post valve closed
1/21/2011	1:11:21 PM	Main Vac valve closed
1/21/2011	1:11:21 PM	Bypass valve closed
1/21/2011	1:11:21 PM	Bubbler valve closed
1/21/2011	1:11:21 PM	Helium MFC set to  0.000000
1/21/2011	1:11:21 PM	H2 MFC set to  0.000000
1/21/2011	1:11:21 PM	BCl3 MFC set to  0.000000
1/21/2011	1:11:21 PM	PHl3 MFC set to  0.000000
1/21/2011	1:11:21 PM	SiCl4 MFC set to  0.000000
1/21/2011	1:11:21 PM	Bypass solenoid MFC set to  0.000000
1/21/2011	1:11:21 PM	Tube furnace set to 0
1/21/2011	1:11:21 PM	Run finished at 1:11 PM
1/21/2011	1:24:45 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/21/2011	1:24:46 PM	Recipe started at 1:24 PM
1/21/2011	1:24:46 PM	H2 valve closed
1/21/2011	1:24:46 PM	BCl3 valve closed
1/21/2011	1:24:46 PM	PH3 valve closed
1/21/2011	1:24:46 PM	SiCl4 pre valve closed
1/21/2011	1:24:46 PM	SiCl4 post valve closed
1/21/2011	1:24:46 PM	Main Vac valve closed
1/21/2011	1:24:46 PM	Bypass valve closed
1/21/2011	1:24:46 PM	Bubbler valve closed
1/21/2011	1:24:46 PM	Helium valve opened
1/21/2011	1:24:46 PM	Helium MFC set to  500.000000
1/21/2011	1:24:46 PM	H2 MFC set to  0.000000
1/21/2011	1:24:46 PM	BCl3 MFC set to  0.000000
1/21/2011	1:24:46 PM	PHl3 MFC set to  0.000000
1/21/2011	1:24:46 PM	SiCl4 MFC set to  0.000000
1/21/2011	1:24:46 PM	Bypass solenoid MFC set to  0.000000
1/21/2011	1:24:46 PM	Tube furnace set to 0
1/21/2011	1:24:52 PM	Helium valve closed
1/21/2011	1:24:52 PM	H2 valve closed
1/21/2011	1:24:52 PM	BCl3 valve closed
1/21/2011	1:24:52 PM	PH3 valve closed
1/21/2011	1:24:52 PM	SiCl4 pre valve closed
1/21/2011	1:24:52 PM	SiCl4 post valve closed
1/21/2011	1:24:52 PM	Main Vac valve closed
1/21/2011	1:24:52 PM	Bypass valve closed
1/21/2011	1:24:52 PM	Bubbler valve closed
1/21/2011	1:24:52 PM	Helium MFC set to  0.000000
1/21/2011	1:24:52 PM	H2 MFC set to  0.000000
1/21/2011	1:24:52 PM	BCl3 MFC set to  0.000000
1/21/2011	1:24:52 PM	PHl3 MFC set to  0.000000
1/21/2011	1:24:52 PM	SiCl4 MFC set to  0.000000
1/21/2011	1:24:52 PM	Bypass solenoid MFC set to  0.000000
1/21/2011	1:24:52 PM	Tube furnace set to 0
1/21/2011	1:24:52 PM	Run finished at 1:24 PM
1/21/2011	1:24:52 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/21/2011	1:28:41 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/21/2011	1:28:41 PM	Recipe started at 1:28 PM
1/21/2011	1:28:42 PM	Helium valve closed
1/21/2011	1:28:42 PM	H2 valve closed
1/21/2011	1:28:42 PM	BCl3 valve closed
1/21/2011	1:28:42 PM	PH3 valve closed
1/21/2011	1:28:42 PM	SiCl4 pre valve closed
1/21/2011	1:28:42 PM	SiCl4 post valve closed
1/21/2011	1:28:42 PM	Main Vac valve closed
1/21/2011	1:28:42 PM	Bubbler valve closed
1/21/2011	1:28:42 PM	Bypass valve opened
1/21/2011	1:28:42 PM	Helium MFC set to  0.000000
1/21/2011	1:28:42 PM	H2 MFC set to  0.000000
1/21/2011	1:28:42 PM	BCl3 MFC set to  0.000000
1/21/2011	1:28:42 PM	PHl3 MFC set to  0.000000
1/21/2011	1:28:42 PM	SiCl4 MFC set to  0.000000
1/21/2011	1:28:42 PM	Bypass solenoid MFC set to  0.000000
1/21/2011	1:28:42 PM	Tube furnace set to 0
1/21/2011	1:29:12 PM	Helium valve closed
1/21/2011	1:29:12 PM	H2 valve closed
1/21/2011	1:29:12 PM	BCl3 valve closed
1/21/2011	1:29:12 PM	PH3 valve closed
1/21/2011	1:29:12 PM	SiCl4 pre valve closed
1/21/2011	1:29:12 PM	SiCl4 post valve closed
1/21/2011	1:29:12 PM	Bubbler valve closed
1/21/2011	1:29:12 PM	Main Vac valve opened
1/21/2011	1:29:12 PM	Bypass valve opened
1/21/2011	1:29:12 PM	Helium MFC set to  0.000000
1/21/2011	1:29:12 PM	H2 MFC set to  0.000000
1/21/2011	1:29:12 PM	BCl3 MFC set to  0.000000
1/21/2011	1:29:12 PM	PHl3 MFC set to  0.000000
1/21/2011	1:29:12 PM	SiCl4 MFC set to  0.000000
1/21/2011	1:29:12 PM	Bypass solenoid MFC set to  0.000000
1/21/2011	1:29:12 PM	Tube furnace set to 0
1/21/2011	1:29:12 PM	Run finished at 1:29 PM
1/21/2011	1:29:12 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/21/2011	1:29:40 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
1/21/2011	1:29:53 PM	Recipe started at 1:29 PM
1/21/2011	1:29:53 PM	Helium valve closed
1/21/2011	1:29:53 PM	H2 valve closed
1/21/2011	1:29:53 PM	BCl3 valve closed
1/21/2011	1:29:53 PM	PH3 valve closed
1/21/2011	1:29:53 PM	SiCl4 pre valve closed
1/21/2011	1:29:53 PM	SiCl4 post valve closed
1/21/2011	1:29:53 PM	Main Vac valve closed
1/21/2011	1:29:53 PM	Bubbler valve closed
1/21/2011	1:29:53 PM	Bypass valve opened
1/21/2011	1:29:53 PM	Helium MFC set to  0.000000
1/21/2011	1:29:53 PM	H2 MFC set to  0.000000
1/21/2011	1:29:53 PM	BCl3 MFC set to  0.000000
1/21/2011	1:29:53 PM	PHl3 MFC set to  0.000000
1/21/2011	1:29:53 PM	SiCl4 MFC set to  0.000000
1/21/2011	1:29:53 PM	Bypass solenoid MFC set to  0.000000
1/21/2011	1:29:53 PM	Tube furnace set to 0
1/21/2011	1:29:53 PM	Helium valve closed
1/21/2011	1:29:53 PM	H2 valve closed
1/21/2011	1:29:53 PM	BCl3 valve closed
1/21/2011	1:29:53 PM	PH3 valve closed
1/21/2011	1:29:53 PM	SiCl4 pre valve closed
1/21/2011	1:29:53 PM	SiCl4 post valve closed
1/21/2011	1:29:53 PM	Bubbler valve closed
1/21/2011	1:29:53 PM	Main Vac valve opened
1/21/2011	1:29:53 PM	Bypass valve opened
1/21/2011	1:29:53 PM	Helium MFC set to  0.000000
1/21/2011	1:29:53 PM	H2 MFC set to  0.000000
1/21/2011	1:29:53 PM	BCl3 MFC set to  0.000000
1/21/2011	1:29:53 PM	PHl3 MFC set to  0.000000
1/21/2011	1:29:53 PM	SiCl4 MFC set to  0.000000
1/21/2011	1:29:53 PM	Bypass solenoid MFC set to  0.000000
1/21/2011	1:29:53 PM	Tube furnace set to 0
1/21/2011	1:30:53 PM	H2 valve closed
1/21/2011	1:30:53 PM	BCl3 valve closed
1/21/2011	1:30:53 PM	PH3 valve closed
1/21/2011	1:30:53 PM	SiCl4 pre valve closed
1/21/2011	1:30:53 PM	SiCl4 post valve closed
1/21/2011	1:30:53 PM	Bubbler valve closed
1/21/2011	1:30:53 PM	Helium valve opened
1/21/2011	1:30:53 PM	Main Vac valve opened
1/21/2011	1:30:53 PM	Bypass valve opened
1/21/2011	1:30:53 PM	Helium MFC set to  100.000000
1/21/2011	1:30:53 PM	H2 MFC set to  0.000000
1/21/2011	1:30:53 PM	BCl3 MFC set to  0.000000
1/21/2011	1:30:53 PM	PHl3 MFC set to  0.000000
1/21/2011	1:30:53 PM	SiCl4 MFC set to  0.000000
1/21/2011	1:30:53 PM	Bypass solenoid MFC set to  0.000000
1/21/2011	1:30:54 PM	Tube furnace set to 0
1/21/2011	1:31:54 PM	Helium valve closed
1/21/2011	1:31:54 PM	H2 valve closed
1/21/2011	1:31:54 PM	BCl3 valve closed
1/21/2011	1:31:54 PM	PH3 valve closed
1/21/2011	1:31:54 PM	SiCl4 pre valve closed
1/21/2011	1:31:54 PM	SiCl4 post valve closed
1/21/2011	1:31:54 PM	Bubbler valve closed
1/21/2011	1:31:54 PM	Main Vac valve opened
1/21/2011	1:31:54 PM	Bypass valve opened
1/21/2011	1:31:54 PM	Helium MFC set to  0.000000
1/21/2011	1:31:54 PM	H2 MFC set to  0.000000
1/21/2011	1:31:54 PM	BCl3 MFC set to  0.000000
1/21/2011	1:31:54 PM	PHl3 MFC set to  0.000000
1/21/2011	1:31:54 PM	SiCl4 MFC set to  0.000000
1/21/2011	1:31:54 PM	Bypass solenoid MFC set to  0.000000
1/21/2011	1:31:54 PM	Tube furnace set to 0
1/21/2011	1:32:54 PM	H2 valve closed
1/21/2011	1:32:54 PM	BCl3 valve closed
1/21/2011	1:32:54 PM	PH3 valve closed
1/21/2011	1:32:54 PM	SiCl4 pre valve closed
1/21/2011	1:32:54 PM	SiCl4 post valve closed
1/21/2011	1:32:54 PM	Bubbler valve closed
1/21/2011	1:32:54 PM	Helium valve opened
1/21/2011	1:32:54 PM	Main Vac valve opened
1/21/2011	1:32:54 PM	Bypass valve opened
1/21/2011	1:32:54 PM	Helium MFC set to  100.000000
1/21/2011	1:32:54 PM	H2 MFC set to  0.000000
1/21/2011	1:32:54 PM	BCl3 MFC set to  0.000000
1/21/2011	1:32:54 PM	PHl3 MFC set to  0.000000
1/21/2011	1:32:54 PM	SiCl4 MFC set to  0.000000
1/21/2011	1:32:54 PM	Bypass solenoid MFC set to  0.000000
1/21/2011	1:32:54 PM	Tube furnace set to 0
1/21/2011	1:33:54 PM	Helium valve closed
1/21/2011	1:33:54 PM	H2 valve closed
1/21/2011	1:33:54 PM	BCl3 valve closed
1/21/2011	1:33:54 PM	PH3 valve closed
1/21/2011	1:33:54 PM	SiCl4 pre valve closed
1/21/2011	1:33:54 PM	SiCl4 post valve closed
1/21/2011	1:33:54 PM	Bubbler valve closed
1/21/2011	1:33:54 PM	Main Vac valve opened
1/21/2011	1:33:54 PM	Bypass valve opened
1/21/2011	1:33:54 PM	Helium MFC set to  0.000000
1/21/2011	1:33:54 PM	H2 MFC set to  0.000000
1/21/2011	1:33:54 PM	BCl3 MFC set to  0.000000
1/21/2011	1:33:54 PM	PHl3 MFC set to  0.000000
1/21/2011	1:33:54 PM	SiCl4 MFC set to  0.000000
1/21/2011	1:33:54 PM	Bypass solenoid MFC set to  0.000000
1/21/2011	1:33:54 PM	Tube furnace set to 0
1/21/2011	1:34:54 PM	H2 valve closed
1/21/2011	1:34:54 PM	BCl3 valve closed
1/21/2011	1:34:54 PM	PH3 valve closed
1/21/2011	1:34:54 PM	SiCl4 pre valve closed
1/21/2011	1:34:54 PM	SiCl4 post valve closed
1/21/2011	1:34:54 PM	Bubbler valve closed
1/21/2011	1:34:54 PM	Helium valve opened
1/21/2011	1:34:54 PM	Main Vac valve opened
1/21/2011	1:34:54 PM	Bypass valve opened
1/21/2011	1:34:54 PM	Helium MFC set to  100.000000
1/21/2011	1:34:54 PM	H2 MFC set to  0.000000
1/21/2011	1:34:54 PM	BCl3 MFC set to  0.000000
1/21/2011	1:34:54 PM	PHl3 MFC set to  0.000000
1/21/2011	1:34:54 PM	SiCl4 MFC set to  0.000000
1/21/2011	1:34:54 PM	Bypass solenoid MFC set to  0.000000
1/21/2011	1:34:54 PM	Tube furnace set to 0
1/21/2011	1:35:54 PM	Helium valve closed
1/21/2011	1:35:54 PM	H2 valve closed
1/21/2011	1:35:54 PM	BCl3 valve closed
1/21/2011	1:35:54 PM	PH3 valve closed
1/21/2011	1:35:54 PM	SiCl4 pre valve closed
1/21/2011	1:35:54 PM	SiCl4 post valve closed
1/21/2011	1:35:54 PM	Bubbler valve closed
1/21/2011	1:35:54 PM	Main Vac valve opened
1/21/2011	1:35:54 PM	Bypass valve opened
1/21/2011	1:35:54 PM	Helium MFC set to  0.000000
1/21/2011	1:35:54 PM	H2 MFC set to  0.000000
1/21/2011	1:35:54 PM	BCl3 MFC set to  0.000000
1/21/2011	1:35:54 PM	PHl3 MFC set to  0.000000
1/21/2011	1:35:54 PM	SiCl4 MFC set to  0.000000
1/21/2011	1:35:54 PM	Bypass solenoid MFC set to  0.000000
1/21/2011	1:35:55 PM	Tube furnace set to 0
1/21/2011	1:36:55 PM	H2 valve closed
1/21/2011	1:36:55 PM	BCl3 valve closed
1/21/2011	1:36:55 PM	PH3 valve closed
1/21/2011	1:36:55 PM	SiCl4 pre valve closed
1/21/2011	1:36:55 PM	SiCl4 post valve closed
1/21/2011	1:36:55 PM	Bubbler valve closed
1/21/2011	1:36:55 PM	Helium valve opened
1/21/2011	1:36:55 PM	Main Vac valve opened
1/21/2011	1:36:55 PM	Bypass valve opened
1/21/2011	1:36:55 PM	Helium MFC set to  100.000000
1/21/2011	1:36:55 PM	H2 MFC set to  0.000000
1/21/2011	1:36:55 PM	BCl3 MFC set to  0.000000
1/21/2011	1:36:55 PM	PHl3 MFC set to  0.000000
1/21/2011	1:36:55 PM	SiCl4 MFC set to  0.000000
1/21/2011	1:36:55 PM	Bypass solenoid MFC set to  0.000000
1/21/2011	1:36:55 PM	Tube furnace set to 0
1/21/2011	1:37:55 PM	Helium valve closed
1/21/2011	1:37:55 PM	H2 valve closed
1/21/2011	1:37:55 PM	BCl3 valve closed
1/21/2011	1:37:55 PM	PH3 valve closed
1/21/2011	1:37:55 PM	SiCl4 pre valve closed
1/21/2011	1:37:55 PM	SiCl4 post valve closed
1/21/2011	1:37:55 PM	Bubbler valve closed
1/21/2011	1:37:55 PM	Main Vac valve opened
1/21/2011	1:37:55 PM	Bypass valve opened
1/21/2011	1:37:55 PM	Helium MFC set to  0.000000
1/21/2011	1:37:55 PM	H2 MFC set to  0.000000
1/21/2011	1:37:55 PM	BCl3 MFC set to  0.000000
1/21/2011	1:37:55 PM	PHl3 MFC set to  0.000000
1/21/2011	1:37:55 PM	SiCl4 MFC set to  0.000000
1/21/2011	1:37:55 PM	Bypass solenoid MFC set to  0.000000
1/21/2011	1:37:55 PM	Tube furnace set to 0
1/21/2011	1:38:55 PM	H2 valve closed
1/21/2011	1:38:55 PM	BCl3 valve closed
1/21/2011	1:38:55 PM	PH3 valve closed
1/21/2011	1:38:55 PM	SiCl4 pre valve closed
1/21/2011	1:38:55 PM	SiCl4 post valve closed
1/21/2011	1:38:55 PM	Bubbler valve closed
1/21/2011	1:38:55 PM	Helium valve opened
1/21/2011	1:38:55 PM	Main Vac valve opened
1/21/2011	1:38:55 PM	Bypass valve opened
1/21/2011	1:38:55 PM	Helium MFC set to  100.000000
1/21/2011	1:38:55 PM	H2 MFC set to  0.000000
1/21/2011	1:38:55 PM	BCl3 MFC set to  0.000000
1/21/2011	1:38:55 PM	PHl3 MFC set to  0.000000
1/21/2011	1:38:55 PM	SiCl4 MFC set to  0.000000
1/21/2011	1:38:55 PM	Bypass solenoid MFC set to  0.000000
1/21/2011	1:38:55 PM	Tube furnace set to 0
1/21/2011	1:39:55 PM	Helium valve closed
1/21/2011	1:39:55 PM	H2 valve closed
1/21/2011	1:39:55 PM	BCl3 valve closed
1/21/2011	1:39:55 PM	PH3 valve closed
1/21/2011	1:39:55 PM	SiCl4 pre valve closed
1/21/2011	1:39:55 PM	SiCl4 post valve closed
1/21/2011	1:39:55 PM	Bubbler valve closed
1/21/2011	1:39:55 PM	Main Vac valve opened
1/21/2011	1:39:55 PM	Bypass valve opened
1/21/2011	1:39:55 PM	Helium MFC set to  0.000000
1/21/2011	1:39:55 PM	H2 MFC set to  0.000000
1/21/2011	1:39:55 PM	BCl3 MFC set to  0.000000
1/21/2011	1:39:55 PM	PHl3 MFC set to  0.000000
1/21/2011	1:39:55 PM	SiCl4 MFC set to  0.000000
1/21/2011	1:39:55 PM	Bypass solenoid MFC set to  0.000000
1/21/2011	1:39:55 PM	Tube furnace set to 0
1/21/2011	1:40:55 PM	H2 valve closed
1/21/2011	1:40:55 PM	BCl3 valve closed
1/21/2011	1:40:55 PM	PH3 valve closed
1/21/2011	1:40:55 PM	SiCl4 pre valve closed
1/21/2011	1:40:55 PM	SiCl4 post valve closed
1/21/2011	1:40:55 PM	Bubbler valve closed
1/21/2011	1:40:55 PM	Helium valve opened
1/21/2011	1:40:55 PM	Main Vac valve opened
1/21/2011	1:40:55 PM	Bypass valve opened
1/21/2011	1:40:55 PM	Helium MFC set to  100.000000
1/21/2011	1:40:55 PM	H2 MFC set to  0.000000
1/21/2011	1:40:55 PM	BCl3 MFC set to  0.000000
1/21/2011	1:40:55 PM	PHl3 MFC set to  0.000000
1/21/2011	1:40:55 PM	SiCl4 MFC set to  0.000000
1/21/2011	1:40:55 PM	Bypass solenoid MFC set to  0.000000
1/21/2011	1:40:56 PM	Tube furnace set to 0
1/21/2011	1:41:56 PM	Helium valve closed
1/21/2011	1:41:56 PM	H2 valve closed
1/21/2011	1:41:56 PM	BCl3 valve closed
1/21/2011	1:41:56 PM	PH3 valve closed
1/21/2011	1:41:56 PM	SiCl4 pre valve closed
1/21/2011	1:41:56 PM	SiCl4 post valve closed
1/21/2011	1:41:56 PM	Bubbler valve closed
1/21/2011	1:41:56 PM	Main Vac valve opened
1/21/2011	1:41:56 PM	Bypass valve opened
1/21/2011	1:41:56 PM	Helium MFC set to  0.000000
1/21/2011	1:41:56 PM	H2 MFC set to  0.000000
1/21/2011	1:41:56 PM	BCl3 MFC set to  0.000000
1/21/2011	1:41:56 PM	PHl3 MFC set to  0.000000
1/21/2011	1:41:56 PM	SiCl4 MFC set to  0.000000
1/21/2011	1:41:56 PM	Bypass solenoid MFC set to  0.000000
1/21/2011	1:41:56 PM	Tube furnace set to 0
1/21/2011	1:42:56 PM	H2 valve closed
1/21/2011	1:42:56 PM	BCl3 valve closed
1/21/2011	1:42:56 PM	PH3 valve closed
1/21/2011	1:42:56 PM	SiCl4 pre valve closed
1/21/2011	1:42:56 PM	SiCl4 post valve closed
1/21/2011	1:42:56 PM	Bubbler valve closed
1/21/2011	1:42:56 PM	Helium valve opened
1/21/2011	1:42:56 PM	Main Vac valve opened
1/21/2011	1:42:56 PM	Bypass valve opened
1/21/2011	1:42:56 PM	Helium MFC set to  100.000000
1/21/2011	1:42:56 PM	H2 MFC set to  0.000000
1/21/2011	1:42:56 PM	BCl3 MFC set to  0.000000
1/21/2011	1:42:56 PM	PHl3 MFC set to  0.000000
1/21/2011	1:42:56 PM	SiCl4 MFC set to  0.000000
1/21/2011	1:42:56 PM	Bypass solenoid MFC set to  0.000000
1/21/2011	1:42:56 PM	Tube furnace set to 0
1/21/2011	1:43:56 PM	Helium valve closed
1/21/2011	1:43:56 PM	H2 valve closed
1/21/2011	1:43:56 PM	BCl3 valve closed
1/21/2011	1:43:56 PM	PH3 valve closed
1/21/2011	1:43:56 PM	SiCl4 pre valve closed
1/21/2011	1:43:56 PM	SiCl4 post valve closed
1/21/2011	1:43:56 PM	Bubbler valve closed
1/21/2011	1:43:56 PM	Main Vac valve opened
1/21/2011	1:43:56 PM	Bypass valve opened
1/21/2011	1:43:56 PM	Helium MFC set to  0.000000
1/21/2011	1:43:56 PM	H2 MFC set to  0.000000
1/21/2011	1:43:56 PM	BCl3 MFC set to  0.000000
1/21/2011	1:43:56 PM	PHl3 MFC set to  0.000000
1/21/2011	1:43:56 PM	SiCl4 MFC set to  0.000000
1/21/2011	1:43:56 PM	Bypass solenoid MFC set to  0.000000
1/21/2011	1:43:56 PM	Tube furnace set to 0
1/21/2011	1:44:56 PM	H2 valve closed
1/21/2011	1:44:56 PM	BCl3 valve closed
1/21/2011	1:44:56 PM	PH3 valve closed
1/21/2011	1:44:56 PM	SiCl4 pre valve closed
1/21/2011	1:44:56 PM	SiCl4 post valve closed
1/21/2011	1:44:56 PM	Bubbler valve closed
1/21/2011	1:44:56 PM	Helium valve opened
1/21/2011	1:44:56 PM	Main Vac valve opened
1/21/2011	1:44:56 PM	Bypass valve opened
1/21/2011	1:44:56 PM	Helium MFC set to  100.000000
1/21/2011	1:44:56 PM	H2 MFC set to  0.000000
1/21/2011	1:44:56 PM	BCl3 MFC set to  0.000000
1/21/2011	1:44:56 PM	PHl3 MFC set to  0.000000
1/21/2011	1:44:56 PM	SiCl4 MFC set to  0.000000
1/21/2011	1:44:56 PM	Bypass solenoid MFC set to  0.000000
1/21/2011	1:44:56 PM	Tube furnace set to 0
1/21/2011	1:45:56 PM	Helium valve closed
1/21/2011	1:45:56 PM	H2 valve closed
1/21/2011	1:45:56 PM	BCl3 valve closed
1/21/2011	1:45:56 PM	PH3 valve closed
1/21/2011	1:45:56 PM	SiCl4 pre valve closed
1/21/2011	1:45:56 PM	SiCl4 post valve closed
1/21/2011	1:45:56 PM	Bubbler valve closed
1/21/2011	1:45:56 PM	Main Vac valve opened
1/21/2011	1:45:56 PM	Bypass valve opened
1/21/2011	1:45:56 PM	Helium MFC set to  0.000000
1/21/2011	1:45:56 PM	H2 MFC set to  0.000000
1/21/2011	1:45:56 PM	BCl3 MFC set to  0.000000
1/21/2011	1:45:56 PM	PHl3 MFC set to  0.000000
1/21/2011	1:45:56 PM	SiCl4 MFC set to  0.000000
1/21/2011	1:45:56 PM	Bypass solenoid MFC set to  0.000000
1/21/2011	1:45:57 PM	Tube furnace set to 0
1/21/2011	1:46:57 PM	H2 valve closed
1/21/2011	1:46:57 PM	BCl3 valve closed
1/21/2011	1:46:57 PM	PH3 valve closed
1/21/2011	1:46:57 PM	SiCl4 pre valve closed
1/21/2011	1:46:57 PM	SiCl4 post valve closed
1/21/2011	1:46:57 PM	Bubbler valve closed
1/21/2011	1:46:57 PM	Helium valve opened
1/21/2011	1:46:57 PM	Main Vac valve opened
1/21/2011	1:46:57 PM	Bypass valve opened
1/21/2011	1:46:57 PM	Helium MFC set to  100.000000
1/21/2011	1:46:57 PM	H2 MFC set to  0.000000
1/21/2011	1:46:57 PM	BCl3 MFC set to  0.000000
1/21/2011	1:46:57 PM	PHl3 MFC set to  0.000000
1/21/2011	1:46:57 PM	SiCl4 MFC set to  0.000000
1/21/2011	1:46:57 PM	Bypass solenoid MFC set to  0.000000
1/21/2011	1:46:57 PM	Tube furnace set to 0
1/21/2011	1:47:57 PM	Helium valve closed
1/21/2011	1:47:57 PM	H2 valve closed
1/21/2011	1:47:57 PM	BCl3 valve closed
1/21/2011	1:47:57 PM	PH3 valve closed
1/21/2011	1:47:57 PM	SiCl4 pre valve closed
1/21/2011	1:47:57 PM	SiCl4 post valve closed
1/21/2011	1:47:57 PM	Bubbler valve closed
1/21/2011	1:47:57 PM	Main Vac valve opened
1/21/2011	1:47:57 PM	Bypass valve opened
1/21/2011	1:47:57 PM	Helium MFC set to  0.000000
1/21/2011	1:47:57 PM	H2 MFC set to  0.000000
1/21/2011	1:47:57 PM	BCl3 MFC set to  0.000000
1/21/2011	1:47:57 PM	PHl3 MFC set to  0.000000
1/21/2011	1:47:57 PM	SiCl4 MFC set to  0.000000
1/21/2011	1:47:57 PM	Bypass solenoid MFC set to  0.000000
1/21/2011	1:47:57 PM	Tube furnace set to 0
1/21/2011	1:48:57 PM	H2 valve closed
1/21/2011	1:48:57 PM	BCl3 valve closed
1/21/2011	1:48:57 PM	PH3 valve closed
1/21/2011	1:48:57 PM	SiCl4 pre valve closed
1/21/2011	1:48:57 PM	SiCl4 post valve closed
1/21/2011	1:48:57 PM	Bubbler valve closed
1/21/2011	1:48:57 PM	Helium valve opened
1/21/2011	1:48:57 PM	Main Vac valve opened
1/21/2011	1:48:57 PM	Bypass valve opened
1/21/2011	1:48:57 PM	Helium MFC set to  100.000000
1/21/2011	1:48:57 PM	H2 MFC set to  0.000000
1/21/2011	1:48:57 PM	BCl3 MFC set to  0.000000
1/21/2011	1:48:57 PM	PHl3 MFC set to  0.000000
1/21/2011	1:48:57 PM	SiCl4 MFC set to  0.000000
1/21/2011	1:48:57 PM	Bypass solenoid MFC set to  0.000000
1/21/2011	1:48:57 PM	Tube furnace set to 0
1/21/2011	1:49:57 PM	Helium valve closed
1/21/2011	1:49:57 PM	H2 valve closed
1/21/2011	1:49:57 PM	BCl3 valve closed
1/21/2011	1:49:57 PM	PH3 valve closed
1/21/2011	1:49:57 PM	SiCl4 pre valve closed
1/21/2011	1:49:57 PM	SiCl4 post valve closed
1/21/2011	1:49:57 PM	Bubbler valve closed
1/21/2011	1:49:57 PM	Main Vac valve opened
1/21/2011	1:49:57 PM	Bypass valve opened
1/21/2011	1:49:57 PM	Helium MFC set to  0.000000
1/21/2011	1:49:57 PM	H2 MFC set to  0.000000
1/21/2011	1:49:57 PM	BCl3 MFC set to  0.000000
1/21/2011	1:49:57 PM	PHl3 MFC set to  0.000000
1/21/2011	1:49:57 PM	SiCl4 MFC set to  0.000000
1/21/2011	1:49:57 PM	Bypass solenoid MFC set to  0.000000
1/21/2011	1:49:57 PM	Tube furnace set to 0
1/21/2011	1:49:58 PM	Run finished at 1:49 PM
1/21/2011	1:49:58 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
1/21/2011	1:51:25 PM	Bypass valve closed
1/21/2011	1:51:26 PM	Main Vac valve closed
1/21/2011	1:51:34 PM	Main Vac valve opened
1/21/2011	1:51:34 PM	Bypass valve opened
1/21/2011	1:51:50 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
1/21/2011	1:52:02 PM	Recipe started at 1:51 PM
1/21/2011	1:52:02 PM	Helium valve closed
1/21/2011	1:52:02 PM	H2 valve closed
1/21/2011	1:52:02 PM	BCl3 valve closed
1/21/2011	1:52:02 PM	PH3 valve closed
1/21/2011	1:52:02 PM	SiCl4 pre valve closed
1/21/2011	1:52:02 PM	SiCl4 post valve closed
1/21/2011	1:52:02 PM	Main Vac valve closed
1/21/2011	1:52:02 PM	Bubbler valve closed
1/21/2011	1:52:02 PM	Bypass valve opened
1/21/2011	1:52:02 PM	Helium MFC set to  0.000000
1/21/2011	1:52:02 PM	H2 MFC set to  0.000000
1/21/2011	1:52:02 PM	BCl3 MFC set to  0.000000
1/21/2011	1:52:02 PM	PHl3 MFC set to  0.000000
1/21/2011	1:52:02 PM	SiCl4 MFC set to  0.000000
1/21/2011	1:52:02 PM	Bypass solenoid MFC set to  0.000000
1/21/2011	1:52:03 PM	Tube furnace set to 0
1/21/2011	1:52:03 PM	Helium valve closed
1/21/2011	1:52:03 PM	H2 valve closed
1/21/2011	1:52:03 PM	BCl3 valve closed
1/21/2011	1:52:03 PM	PH3 valve closed
1/21/2011	1:52:03 PM	SiCl4 pre valve closed
1/21/2011	1:52:03 PM	SiCl4 post valve closed
1/21/2011	1:52:03 PM	Bubbler valve closed
1/21/2011	1:52:03 PM	Main Vac valve opened
1/21/2011	1:52:03 PM	Bypass valve opened
1/21/2011	1:52:03 PM	Helium MFC set to  0.000000
1/21/2011	1:52:03 PM	H2 MFC set to  0.000000
1/21/2011	1:52:03 PM	BCl3 MFC set to  0.000000
1/21/2011	1:52:03 PM	PHl3 MFC set to  0.000000
1/21/2011	1:52:03 PM	SiCl4 MFC set to  0.000000
1/21/2011	1:52:03 PM	Bypass solenoid MFC set to  0.000000
1/21/2011	1:52:03 PM	Tube furnace set to 0
1/21/2011	1:52:07 PM	H2 valve closed
1/21/2011	1:52:07 PM	BCl3 valve closed
1/21/2011	1:52:07 PM	PH3 valve closed
1/21/2011	1:52:07 PM	SiCl4 pre valve closed
1/21/2011	1:52:07 PM	SiCl4 post valve closed
1/21/2011	1:52:07 PM	Bubbler valve closed
1/21/2011	1:52:07 PM	Helium valve opened
1/21/2011	1:52:07 PM	Main Vac valve opened
1/21/2011	1:52:07 PM	Bypass valve opened
1/21/2011	1:52:07 PM	Helium MFC set to  100.000000
1/21/2011	1:52:07 PM	H2 MFC set to  0.000000
1/21/2011	1:52:07 PM	BCl3 MFC set to  0.000000
1/21/2011	1:52:07 PM	PHl3 MFC set to  0.000000
1/21/2011	1:52:07 PM	SiCl4 MFC set to  0.000000
1/21/2011	1:52:07 PM	Bypass solenoid MFC set to  0.000000
1/21/2011	1:52:07 PM	Tube furnace set to 0
1/21/2011	1:52:08 PM	Helium valve closed
1/21/2011	1:52:08 PM	H2 valve closed
1/21/2011	1:52:08 PM	BCl3 valve closed
1/21/2011	1:52:08 PM	PH3 valve closed
1/21/2011	1:52:08 PM	SiCl4 pre valve closed
1/21/2011	1:52:08 PM	SiCl4 post valve closed
1/21/2011	1:52:08 PM	Bubbler valve closed
1/21/2011	1:52:08 PM	Main Vac valve opened
1/21/2011	1:52:08 PM	Bypass valve opened
1/21/2011	1:52:08 PM	Helium MFC set to  0.000000
1/21/2011	1:52:08 PM	H2 MFC set to  0.000000
1/21/2011	1:52:08 PM	BCl3 MFC set to  0.000000
1/21/2011	1:52:08 PM	PHl3 MFC set to  0.000000
1/21/2011	1:52:08 PM	SiCl4 MFC set to  0.000000
1/21/2011	1:52:08 PM	Bypass solenoid MFC set to  0.000000
1/21/2011	1:52:08 PM	Tube furnace set to 0
1/21/2011	1:52:09 PM	H2 valve closed
1/21/2011	1:52:09 PM	BCl3 valve closed
1/21/2011	1:52:09 PM	PH3 valve closed
1/21/2011	1:52:09 PM	SiCl4 pre valve closed
1/21/2011	1:52:09 PM	SiCl4 post valve closed
1/21/2011	1:52:09 PM	Bubbler valve closed
1/21/2011	1:52:09 PM	Helium valve opened
1/21/2011	1:52:09 PM	Main Vac valve opened
1/21/2011	1:52:09 PM	Bypass valve opened
1/21/2011	1:52:09 PM	Helium MFC set to  100.000000
1/21/2011	1:52:09 PM	H2 MFC set to  0.000000
1/21/2011	1:52:09 PM	BCl3 MFC set to  0.000000
1/21/2011	1:52:09 PM	PHl3 MFC set to  0.000000
1/21/2011	1:52:09 PM	SiCl4 MFC set to  0.000000
1/21/2011	1:52:09 PM	Bypass solenoid MFC set to  0.000000
1/21/2011	1:52:09 PM	Tube furnace set to 0
1/21/2011	1:52:10 PM	Helium valve closed
1/21/2011	1:52:10 PM	H2 valve closed
1/21/2011	1:52:10 PM	BCl3 valve closed
1/21/2011	1:52:10 PM	PH3 valve closed
1/21/2011	1:52:10 PM	SiCl4 pre valve closed
1/21/2011	1:52:10 PM	SiCl4 post valve closed
1/21/2011	1:52:10 PM	Bubbler valve closed
1/21/2011	1:52:10 PM	Main Vac valve opened
1/21/2011	1:52:10 PM	Bypass valve opened
1/21/2011	1:52:10 PM	Helium MFC set to  0.000000
1/21/2011	1:52:10 PM	H2 MFC set to  0.000000
1/21/2011	1:52:10 PM	BCl3 MFC set to  0.000000
1/21/2011	1:52:10 PM	PHl3 MFC set to  0.000000
1/21/2011	1:52:10 PM	SiCl4 MFC set to  0.000000
1/21/2011	1:52:10 PM	Bypass solenoid MFC set to  0.000000
1/21/2011	1:52:10 PM	Tube furnace set to 0
1/21/2011	1:52:11 PM	H2 valve closed
1/21/2011	1:52:11 PM	BCl3 valve closed
1/21/2011	1:52:11 PM	PH3 valve closed
1/21/2011	1:52:11 PM	SiCl4 pre valve closed
1/21/2011	1:52:11 PM	SiCl4 post valve closed
1/21/2011	1:52:11 PM	Bubbler valve closed
1/21/2011	1:52:11 PM	Helium valve opened
1/21/2011	1:52:11 PM	Main Vac valve opened
1/21/2011	1:52:11 PM	Bypass valve opened
1/21/2011	1:52:11 PM	Helium MFC set to  100.000000
1/21/2011	1:52:11 PM	H2 MFC set to  0.000000
1/21/2011	1:52:11 PM	BCl3 MFC set to  0.000000
1/21/2011	1:52:11 PM	PHl3 MFC set to  0.000000
1/21/2011	1:52:11 PM	SiCl4 MFC set to  0.000000
1/21/2011	1:52:11 PM	Bypass solenoid MFC set to  0.000000
1/21/2011	1:52:12 PM	Tube furnace set to 0
1/21/2011	1:52:12 PM	Helium valve closed
1/21/2011	1:52:12 PM	H2 valve closed
1/21/2011	1:52:12 PM	BCl3 valve closed
1/21/2011	1:52:12 PM	PH3 valve closed
1/21/2011	1:52:12 PM	SiCl4 pre valve closed
1/21/2011	1:52:12 PM	SiCl4 post valve closed
1/21/2011	1:52:12 PM	Bubbler valve closed
1/21/2011	1:52:12 PM	Main Vac valve opened
1/21/2011	1:52:12 PM	Bypass valve opened
1/21/2011	1:52:12 PM	Helium MFC set to  0.000000
1/21/2011	1:52:12 PM	H2 MFC set to  0.000000
1/21/2011	1:52:12 PM	BCl3 MFC set to  0.000000
1/21/2011	1:52:12 PM	PHl3 MFC set to  0.000000
1/21/2011	1:52:12 PM	SiCl4 MFC set to  0.000000
1/21/2011	1:52:12 PM	Bypass solenoid MFC set to  0.000000
1/21/2011	1:52:12 PM	Tube furnace set to 0
1/21/2011	1:52:13 PM	H2 valve closed
1/21/2011	1:52:13 PM	BCl3 valve closed
1/21/2011	1:52:13 PM	PH3 valve closed
1/21/2011	1:52:13 PM	SiCl4 pre valve closed
1/21/2011	1:52:13 PM	SiCl4 post valve closed
1/21/2011	1:52:13 PM	Bubbler valve closed
1/21/2011	1:52:13 PM	Helium valve opened
1/21/2011	1:52:13 PM	Main Vac valve opened
1/21/2011	1:52:13 PM	Bypass valve opened
1/21/2011	1:52:13 PM	Helium MFC set to  100.000000
1/21/2011	1:52:13 PM	H2 MFC set to  0.000000
1/21/2011	1:52:13 PM	BCl3 MFC set to  0.000000
1/21/2011	1:52:13 PM	PHl3 MFC set to  0.000000
1/21/2011	1:52:13 PM	SiCl4 MFC set to  0.000000
1/21/2011	1:52:13 PM	Bypass solenoid MFC set to  0.000000
1/21/2011	1:52:13 PM	Tube furnace set to 0
1/21/2011	1:52:14 PM	Helium valve closed
1/21/2011	1:52:14 PM	H2 valve closed
1/21/2011	1:52:14 PM	BCl3 valve closed
1/21/2011	1:52:14 PM	PH3 valve closed
1/21/2011	1:52:14 PM	SiCl4 pre valve closed
1/21/2011	1:52:14 PM	SiCl4 post valve closed
1/21/2011	1:52:14 PM	Bubbler valve closed
1/21/2011	1:52:14 PM	Main Vac valve opened
1/21/2011	1:52:14 PM	Bypass valve opened
1/21/2011	1:52:14 PM	Helium MFC set to  0.000000
1/21/2011	1:52:14 PM	H2 MFC set to  0.000000
1/21/2011	1:52:14 PM	BCl3 MFC set to  0.000000
1/21/2011	1:52:14 PM	PHl3 MFC set to  0.000000
1/21/2011	1:52:14 PM	SiCl4 MFC set to  0.000000
1/21/2011	1:52:14 PM	Bypass solenoid MFC set to  0.000000
1/21/2011	1:52:14 PM	Tube furnace set to 0
1/21/2011	1:52:15 PM	H2 valve closed
1/21/2011	1:52:15 PM	BCl3 valve closed
1/21/2011	1:52:15 PM	PH3 valve closed
1/21/2011	1:52:15 PM	SiCl4 pre valve closed
1/21/2011	1:52:15 PM	SiCl4 post valve closed
1/21/2011	1:52:15 PM	Bubbler valve closed
1/21/2011	1:52:15 PM	Helium valve opened
1/21/2011	1:52:15 PM	Main Vac valve opened
1/21/2011	1:52:15 PM	Bypass valve opened
1/21/2011	1:52:15 PM	Helium MFC set to  100.000000
1/21/2011	1:52:15 PM	H2 MFC set to  0.000000
1/21/2011	1:52:15 PM	BCl3 MFC set to  0.000000
1/21/2011	1:52:15 PM	PHl3 MFC set to  0.000000
1/21/2011	1:52:15 PM	SiCl4 MFC set to  0.000000
1/21/2011	1:52:15 PM	Bypass solenoid MFC set to  0.000000
1/21/2011	1:52:15 PM	Tube furnace set to 0
1/21/2011	1:52:15 PM	Helium valve closed
1/21/2011	1:52:15 PM	H2 valve closed
1/21/2011	1:52:15 PM	BCl3 valve closed
1/21/2011	1:52:15 PM	PH3 valve closed
1/21/2011	1:52:15 PM	SiCl4 pre valve closed
1/21/2011	1:52:15 PM	SiCl4 post valve closed
1/21/2011	1:52:15 PM	Bubbler valve closed
1/21/2011	1:52:15 PM	Main Vac valve opened
1/21/2011	1:52:15 PM	Bypass valve opened
1/21/2011	1:52:15 PM	Helium MFC set to  0.000000
1/21/2011	1:52:15 PM	H2 MFC set to  0.000000
1/21/2011	1:52:15 PM	BCl3 MFC set to  0.000000
1/21/2011	1:52:15 PM	PHl3 MFC set to  0.000000
1/21/2011	1:52:15 PM	SiCl4 MFC set to  0.000000
1/21/2011	1:52:15 PM	Bypass solenoid MFC set to  0.000000
1/21/2011	1:52:15 PM	Tube furnace set to 0
1/21/2011	1:52:16 PM	H2 valve closed
1/21/2011	1:52:16 PM	BCl3 valve closed
1/21/2011	1:52:16 PM	PH3 valve closed
1/21/2011	1:52:16 PM	SiCl4 pre valve closed
1/21/2011	1:52:16 PM	SiCl4 post valve closed
1/21/2011	1:52:16 PM	Bubbler valve closed
1/21/2011	1:52:16 PM	Helium valve opened
1/21/2011	1:52:16 PM	Main Vac valve opened
1/21/2011	1:52:16 PM	Bypass valve opened
1/21/2011	1:52:16 PM	Helium MFC set to  100.000000
1/21/2011	1:52:16 PM	H2 MFC set to  0.000000
1/21/2011	1:52:16 PM	BCl3 MFC set to  0.000000
1/21/2011	1:52:16 PM	PHl3 MFC set to  0.000000
1/21/2011	1:52:16 PM	SiCl4 MFC set to  0.000000
1/21/2011	1:52:16 PM	Bypass solenoid MFC set to  0.000000
1/21/2011	1:52:16 PM	Tube furnace set to 0
1/21/2011	1:52:17 PM	Helium valve closed
1/21/2011	1:52:17 PM	H2 valve closed
1/21/2011	1:52:17 PM	BCl3 valve closed
1/21/2011	1:52:17 PM	PH3 valve closed
1/21/2011	1:52:17 PM	SiCl4 pre valve closed
1/21/2011	1:52:17 PM	SiCl4 post valve closed
1/21/2011	1:52:17 PM	Bubbler valve closed
1/21/2011	1:52:17 PM	Main Vac valve opened
1/21/2011	1:52:17 PM	Bypass valve opened
1/21/2011	1:52:17 PM	Helium MFC set to  0.000000
1/21/2011	1:52:17 PM	H2 MFC set to  0.000000
1/21/2011	1:52:17 PM	BCl3 MFC set to  0.000000
1/21/2011	1:52:17 PM	PHl3 MFC set to  0.000000
1/21/2011	1:52:17 PM	SiCl4 MFC set to  0.000000
1/21/2011	1:52:17 PM	Bypass solenoid MFC set to  0.000000
1/21/2011	1:52:18 PM	Tube furnace set to 0
1/21/2011	1:53:18 PM	H2 valve closed
1/21/2011	1:53:18 PM	BCl3 valve closed
1/21/2011	1:53:18 PM	PH3 valve closed
1/21/2011	1:53:18 PM	SiCl4 pre valve closed
1/21/2011	1:53:18 PM	SiCl4 post valve closed
1/21/2011	1:53:18 PM	Bubbler valve closed
1/21/2011	1:53:18 PM	Helium valve opened
1/21/2011	1:53:18 PM	Main Vac valve opened
1/21/2011	1:53:18 PM	Bypass valve opened
1/21/2011	1:53:18 PM	Helium MFC set to  100.000000
1/21/2011	1:53:18 PM	H2 MFC set to  0.000000
1/21/2011	1:53:18 PM	BCl3 MFC set to  0.000000
1/21/2011	1:53:18 PM	PHl3 MFC set to  0.000000
1/21/2011	1:53:18 PM	SiCl4 MFC set to  0.000000
1/21/2011	1:53:18 PM	Bypass solenoid MFC set to  0.000000
1/21/2011	1:53:18 PM	Tube furnace set to 0
1/21/2011	1:54:18 PM	Helium valve closed
1/21/2011	1:54:18 PM	H2 valve closed
1/21/2011	1:54:18 PM	BCl3 valve closed
1/21/2011	1:54:18 PM	PH3 valve closed
1/21/2011	1:54:18 PM	SiCl4 pre valve closed
1/21/2011	1:54:18 PM	SiCl4 post valve closed
1/21/2011	1:54:18 PM	Bubbler valve closed
1/21/2011	1:54:18 PM	Main Vac valve opened
1/21/2011	1:54:18 PM	Bypass valve opened
1/21/2011	1:54:18 PM	Helium MFC set to  0.000000
1/21/2011	1:54:18 PM	H2 MFC set to  0.000000
1/21/2011	1:54:18 PM	BCl3 MFC set to  0.000000
1/21/2011	1:54:18 PM	PHl3 MFC set to  0.000000
1/21/2011	1:54:18 PM	SiCl4 MFC set to  0.000000
1/21/2011	1:54:18 PM	Bypass solenoid MFC set to  0.000000
1/21/2011	1:54:18 PM	Tube furnace set to 0
1/21/2011	1:55:18 PM	H2 valve closed
1/21/2011	1:55:18 PM	BCl3 valve closed
1/21/2011	1:55:18 PM	PH3 valve closed
1/21/2011	1:55:18 PM	SiCl4 pre valve closed
1/21/2011	1:55:18 PM	SiCl4 post valve closed
1/21/2011	1:55:18 PM	Bubbler valve closed
1/21/2011	1:55:18 PM	Helium valve opened
1/21/2011	1:55:18 PM	Main Vac valve opened
1/21/2011	1:55:18 PM	Bypass valve opened
1/21/2011	1:55:18 PM	Helium MFC set to  100.000000
1/21/2011	1:55:18 PM	H2 MFC set to  0.000000
1/21/2011	1:55:18 PM	BCl3 MFC set to  0.000000
1/21/2011	1:55:18 PM	PHl3 MFC set to  0.000000
1/21/2011	1:55:18 PM	SiCl4 MFC set to  0.000000
1/21/2011	1:55:18 PM	Bypass solenoid MFC set to  0.000000
1/21/2011	1:55:18 PM	Tube furnace set to 0
1/21/2011	1:56:18 PM	Helium valve closed
1/21/2011	1:56:18 PM	H2 valve closed
1/21/2011	1:56:18 PM	BCl3 valve closed
1/21/2011	1:56:18 PM	PH3 valve closed
1/21/2011	1:56:18 PM	SiCl4 pre valve closed
1/21/2011	1:56:18 PM	SiCl4 post valve closed
1/21/2011	1:56:18 PM	Bubbler valve closed
1/21/2011	1:56:18 PM	Main Vac valve opened
1/21/2011	1:56:18 PM	Bypass valve opened
1/21/2011	1:56:18 PM	Helium MFC set to  0.000000
1/21/2011	1:56:18 PM	H2 MFC set to  0.000000
1/21/2011	1:56:18 PM	BCl3 MFC set to  0.000000
1/21/2011	1:56:18 PM	PHl3 MFC set to  0.000000
1/21/2011	1:56:18 PM	SiCl4 MFC set to  0.000000
1/21/2011	1:56:18 PM	Bypass solenoid MFC set to  0.000000
1/21/2011	1:56:18 PM	Tube furnace set to 0
1/21/2011	1:57:18 PM	H2 valve closed
1/21/2011	1:57:18 PM	BCl3 valve closed
1/21/2011	1:57:18 PM	PH3 valve closed
1/21/2011	1:57:18 PM	SiCl4 pre valve closed
1/21/2011	1:57:18 PM	SiCl4 post valve closed
1/21/2011	1:57:18 PM	Bubbler valve closed
1/21/2011	1:57:18 PM	Helium valve opened
1/21/2011	1:57:18 PM	Main Vac valve opened
1/21/2011	1:57:18 PM	Bypass valve opened
1/21/2011	1:57:18 PM	Helium MFC set to  100.000000
1/21/2011	1:57:18 PM	H2 MFC set to  0.000000
1/21/2011	1:57:18 PM	BCl3 MFC set to  0.000000
1/21/2011	1:57:18 PM	PHl3 MFC set to  0.000000
1/21/2011	1:57:18 PM	SiCl4 MFC set to  0.000000
1/21/2011	1:57:18 PM	Bypass solenoid MFC set to  0.000000
1/21/2011	1:57:19 PM	Tube furnace set to 0
1/21/2011	1:58:19 PM	Helium valve closed
1/21/2011	1:58:19 PM	H2 valve closed
1/21/2011	1:58:19 PM	BCl3 valve closed
1/21/2011	1:58:19 PM	PH3 valve closed
1/21/2011	1:58:19 PM	SiCl4 pre valve closed
1/21/2011	1:58:19 PM	SiCl4 post valve closed
1/21/2011	1:58:19 PM	Bubbler valve closed
1/21/2011	1:58:19 PM	Main Vac valve opened
1/21/2011	1:58:19 PM	Bypass valve opened
1/21/2011	1:58:19 PM	Helium MFC set to  0.000000
1/21/2011	1:58:19 PM	H2 MFC set to  0.000000
1/21/2011	1:58:19 PM	BCl3 MFC set to  0.000000
1/21/2011	1:58:19 PM	PHl3 MFC set to  0.000000
1/21/2011	1:58:19 PM	SiCl4 MFC set to  0.000000
1/21/2011	1:58:19 PM	Bypass solenoid MFC set to  0.000000
1/21/2011	1:58:19 PM	Tube furnace set to 0
1/21/2011	1:59:19 PM	H2 valve closed
1/21/2011	1:59:19 PM	BCl3 valve closed
1/21/2011	1:59:19 PM	PH3 valve closed
1/21/2011	1:59:19 PM	SiCl4 pre valve closed
1/21/2011	1:59:19 PM	SiCl4 post valve closed
1/21/2011	1:59:19 PM	Bubbler valve closed
1/21/2011	1:59:19 PM	Helium valve opened
1/21/2011	1:59:19 PM	Main Vac valve opened
1/21/2011	1:59:19 PM	Bypass valve opened
1/21/2011	1:59:19 PM	Helium MFC set to  100.000000
1/21/2011	1:59:19 PM	H2 MFC set to  0.000000
1/21/2011	1:59:19 PM	BCl3 MFC set to  0.000000
1/21/2011	1:59:19 PM	PHl3 MFC set to  0.000000
1/21/2011	1:59:19 PM	SiCl4 MFC set to  0.000000
1/21/2011	1:59:19 PM	Bypass solenoid MFC set to  0.000000
1/21/2011	1:59:19 PM	Tube furnace set to 0
1/21/2011	2:00:19 PM	Helium valve closed
1/21/2011	2:00:19 PM	H2 valve closed
1/21/2011	2:00:19 PM	BCl3 valve closed
1/21/2011	2:00:19 PM	PH3 valve closed
1/21/2011	2:00:19 PM	SiCl4 pre valve closed
1/21/2011	2:00:19 PM	SiCl4 post valve closed
1/21/2011	2:00:19 PM	Bubbler valve closed
1/21/2011	2:00:19 PM	Main Vac valve opened
1/21/2011	2:00:19 PM	Bypass valve opened
1/21/2011	2:00:19 PM	Helium MFC set to  0.000000
1/21/2011	2:00:19 PM	H2 MFC set to  0.000000
1/21/2011	2:00:19 PM	BCl3 MFC set to  0.000000
1/21/2011	2:00:19 PM	PHl3 MFC set to  0.000000
1/21/2011	2:00:19 PM	SiCl4 MFC set to  0.000000
1/21/2011	2:00:19 PM	Bypass solenoid MFC set to  0.000000
1/21/2011	2:00:19 PM	Tube furnace set to 0
1/21/2011	2:00:20 PM	Run finished at 2:00 PM
1/21/2011	2:00:20 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
1/21/2011	2:03:40 PM	Recipe started at 2:03 PM
1/21/2011	2:03:40 PM	Helium valve closed
1/21/2011	2:03:40 PM	BCl3 valve closed
1/21/2011	2:03:40 PM	PH3 valve closed
1/21/2011	2:03:40 PM	SiCl4 pre valve closed
1/21/2011	2:03:40 PM	SiCl4 post valve closed
1/21/2011	2:03:40 PM	Main Vac valve closed
1/21/2011	2:03:40 PM	Bypass valve closed
1/21/2011	2:03:40 PM	Bubbler valve closed
1/21/2011	2:03:40 PM	H2 valve opened
1/21/2011	2:03:40 PM	Helium MFC set to  0.000000
1/21/2011	2:03:40 PM	H2 MFC set to  500.000000
1/21/2011	2:03:40 PM	BCl3 MFC set to  0.000000
1/21/2011	2:03:40 PM	PHl3 MFC set to  0.000000
1/21/2011	2:03:40 PM	SiCl4 MFC set to  0.000000
1/21/2011	2:03:40 PM	Bypass solenoid MFC set to  0.000000
1/21/2011	2:03:40 PM	Tube furnace set to 0
1/21/2011	2:04:57 PM	Helium valve closed
1/21/2011	2:04:57 PM	BCl3 valve closed
1/21/2011	2:04:57 PM	PH3 valve closed
1/21/2011	2:04:57 PM	SiCl4 pre valve closed
1/21/2011	2:04:57 PM	SiCl4 post valve closed
1/21/2011	2:04:57 PM	Main Vac valve closed
1/21/2011	2:04:57 PM	Bypass valve closed
1/21/2011	2:04:57 PM	H2 valve opened
1/21/2011	2:04:57 PM	Bubbler valve opened
1/21/2011	2:04:57 PM	Helium MFC set to  0.000000
1/21/2011	2:04:57 PM	H2 MFC set to  500.000000
1/21/2011	2:04:57 PM	BCl3 MFC set to  0.000000
1/21/2011	2:04:57 PM	PHl3 MFC set to  0.000000
1/21/2011	2:04:57 PM	SiCl4 MFC set to  0.000000
1/21/2011	2:04:57 PM	Bypass solenoid MFC set to  0.000000
1/21/2011	2:04:57 PM	Tube furnace set to 1000
1/21/2011	2:24:57 PM	Helium valve closed
1/21/2011	2:24:57 PM	BCl3 valve closed
1/21/2011	2:24:57 PM	Main Vac valve closed
1/21/2011	2:24:57 PM	Bypass valve closed
1/21/2011	2:24:57 PM	H2 valve opened
1/21/2011	2:24:57 PM	PH3 valve opened
1/21/2011	2:24:57 PM	SiCl4 pre valve opened
1/21/2011	2:24:57 PM	SiCl4 post valve opened
1/21/2011	2:24:57 PM	Bubbler valve opened
1/21/2011	2:24:57 PM	Helium MFC set to  0.000000
1/21/2011	2:24:57 PM	H2 MFC set to  500.000000
1/21/2011	2:24:57 PM	BCl3 MFC set to  0.000000
1/21/2011	2:24:57 PM	PHl3 MFC set to  1.000000
1/21/2011	2:24:57 PM	SiCl4 MFC set to  50.000000
1/21/2011	2:24:57 PM	Bypass solenoid MFC set to  0.000000
1/21/2011	2:24:57 PM	Tube furnace set to 1000
1/21/2011	2:41:57 PM	H2 valve closed
1/21/2011	2:41:57 PM	BCl3 valve closed
1/21/2011	2:41:57 PM	PH3 valve closed
1/21/2011	2:41:57 PM	SiCl4 pre valve closed
1/21/2011	2:41:57 PM	SiCl4 post valve closed
1/21/2011	2:41:57 PM	Main Vac valve closed
1/21/2011	2:41:57 PM	Bypass valve closed
1/21/2011	2:41:57 PM	Helium valve opened
1/21/2011	2:41:57 PM	Bubbler valve opened
1/21/2011	2:41:57 PM	Helium MFC set to  500.000000
1/21/2011	2:41:57 PM	H2 MFC set to  0.000000
1/21/2011	2:41:57 PM	BCl3 MFC set to  0.000000
1/21/2011	2:41:57 PM	PHl3 MFC set to  0.000000
1/21/2011	2:41:57 PM	SiCl4 MFC set to  0.000000
1/21/2011	2:41:57 PM	Bypass solenoid MFC set to  0.000000
1/21/2011	2:41:57 PM	Tube furnace set to 0
1/21/2011	3:01:57 PM	Helium valve closed
1/21/2011	3:01:57 PM	H2 valve closed
1/21/2011	3:01:57 PM	BCl3 valve closed
1/21/2011	3:01:57 PM	PH3 valve closed
1/21/2011	3:01:57 PM	SiCl4 pre valve closed
1/21/2011	3:01:57 PM	SiCl4 post valve closed
1/21/2011	3:01:57 PM	Main Vac valve closed
1/21/2011	3:01:57 PM	Bypass valve closed
1/21/2011	3:01:57 PM	Bubbler valve closed
1/21/2011	3:01:57 PM	Helium MFC set to  0.000000
1/21/2011	3:01:57 PM	H2 MFC set to  0.000000
1/21/2011	3:01:57 PM	BCl3 MFC set to  0.000000
1/21/2011	3:01:57 PM	PHl3 MFC set to  0.000000
1/21/2011	3:01:57 PM	SiCl4 MFC set to  0.000000
1/21/2011	3:01:57 PM	Bypass solenoid MFC set to  0.000000
1/21/2011	3:01:58 PM	Tube furnace set to 0
1/21/2011	3:01:58 PM	Run finished at 3:01 PM
1/21/2011	3:20:31 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/21/2011	3:20:32 PM	Recipe started at 3:20 PM
1/21/2011	3:20:32 PM	H2 valve closed
1/21/2011	3:20:32 PM	BCl3 valve closed
1/21/2011	3:20:32 PM	PH3 valve closed
1/21/2011	3:20:32 PM	SiCl4 pre valve closed
1/21/2011	3:20:32 PM	SiCl4 post valve closed
1/21/2011	3:20:32 PM	Main Vac valve closed
1/21/2011	3:20:32 PM	Bypass valve closed
1/21/2011	3:20:32 PM	Bubbler valve closed
1/21/2011	3:20:32 PM	Helium valve opened
1/21/2011	3:20:32 PM	Helium MFC set to  500.000000
1/21/2011	3:20:32 PM	H2 MFC set to  0.000000
1/21/2011	3:20:32 PM	BCl3 MFC set to  0.000000
1/21/2011	3:20:32 PM	PHl3 MFC set to  0.000000
1/21/2011	3:20:32 PM	SiCl4 MFC set to  0.000000
1/21/2011	3:20:32 PM	Bypass solenoid MFC set to  0.000000
1/21/2011	3:20:32 PM	Tube furnace set to 0
1/21/2011	3:20:38 PM	Helium valve closed
1/21/2011	3:20:38 PM	H2 valve closed
1/21/2011	3:20:38 PM	BCl3 valve closed
1/21/2011	3:20:38 PM	PH3 valve closed
1/21/2011	3:20:38 PM	SiCl4 pre valve closed
1/21/2011	3:20:38 PM	SiCl4 post valve closed
1/21/2011	3:20:38 PM	Main Vac valve closed
1/21/2011	3:20:38 PM	Bypass valve closed
1/21/2011	3:20:38 PM	Bubbler valve closed
1/21/2011	3:20:38 PM	Helium MFC set to  0.000000
1/21/2011	3:20:38 PM	H2 MFC set to  0.000000
1/21/2011	3:20:38 PM	BCl3 MFC set to  0.000000
1/21/2011	3:20:38 PM	PHl3 MFC set to  0.000000
1/21/2011	3:20:38 PM	SiCl4 MFC set to  0.000000
1/21/2011	3:20:38 PM	Bypass solenoid MFC set to  0.000000
1/21/2011	3:20:38 PM	Tube furnace set to 0
1/21/2011	3:20:39 PM	Run finished at 3:20 PM
1/21/2011	3:20:39 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/21/2011	3:22:57 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/21/2011	3:22:58 PM	Recipe started at 3:22 PM
1/21/2011	3:22:58 PM	Helium valve closed
1/21/2011	3:22:58 PM	H2 valve closed
1/21/2011	3:22:58 PM	BCl3 valve closed
1/21/2011	3:22:58 PM	PH3 valve closed
1/21/2011	3:22:58 PM	SiCl4 pre valve closed
1/21/2011	3:22:58 PM	SiCl4 post valve closed
1/21/2011	3:22:58 PM	Main Vac valve closed
1/21/2011	3:22:58 PM	Bubbler valve closed
1/21/2011	3:22:58 PM	Bypass valve opened
1/21/2011	3:22:58 PM	Helium MFC set to  0.000000
1/21/2011	3:22:58 PM	H2 MFC set to  0.000000
1/21/2011	3:22:58 PM	BCl3 MFC set to  0.000000
1/21/2011	3:22:58 PM	PHl3 MFC set to  0.000000
1/21/2011	3:22:58 PM	SiCl4 MFC set to  0.000000
1/21/2011	3:22:58 PM	Bypass solenoid MFC set to  0.000000
1/21/2011	3:22:58 PM	Tube furnace set to 0
1/21/2011	3:23:28 PM	Helium valve closed
1/21/2011	3:23:28 PM	H2 valve closed
1/21/2011	3:23:28 PM	BCl3 valve closed
1/21/2011	3:23:28 PM	PH3 valve closed
1/21/2011	3:23:28 PM	SiCl4 pre valve closed
1/21/2011	3:23:28 PM	SiCl4 post valve closed
1/21/2011	3:23:28 PM	Bubbler valve closed
1/21/2011	3:23:28 PM	Main Vac valve opened
1/21/2011	3:23:28 PM	Bypass valve opened
1/21/2011	3:23:28 PM	Helium MFC set to  0.000000
1/21/2011	3:23:28 PM	H2 MFC set to  0.000000
1/21/2011	3:23:28 PM	BCl3 MFC set to  0.000000
1/21/2011	3:23:28 PM	PHl3 MFC set to  0.000000
1/21/2011	3:23:28 PM	SiCl4 MFC set to  0.000000
1/21/2011	3:23:28 PM	Bypass solenoid MFC set to  0.000000
1/21/2011	3:23:29 PM	Tube furnace set to 0
1/21/2011	3:23:29 PM	Run finished at 3:23 PM
1/21/2011	3:23:29 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/21/2011	3:30:38 PM	Bypass valve closed
1/21/2011	3:30:38 PM	Main Vac valve closed
1/21/2011	3:30:53 PM	Bypass valve opened
1/21/2011	3:30:54 PM	Main Vac valve opened
1/21/2011	3:31:00 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
1/21/2011	3:31:13 PM	Recipe started at 3:31 PM
1/21/2011	3:31:13 PM	Helium valve closed
1/21/2011	3:31:13 PM	H2 valve closed
1/21/2011	3:31:13 PM	BCl3 valve closed
1/21/2011	3:31:13 PM	PH3 valve closed
1/21/2011	3:31:13 PM	SiCl4 pre valve closed
1/21/2011	3:31:13 PM	SiCl4 post valve closed
1/21/2011	3:31:13 PM	Main Vac valve closed
1/21/2011	3:31:13 PM	Bubbler valve closed
1/21/2011	3:31:13 PM	Bypass valve opened
1/21/2011	3:31:13 PM	Helium MFC set to  0.000000
1/21/2011	3:31:13 PM	H2 MFC set to  0.000000
1/21/2011	3:31:13 PM	BCl3 MFC set to  0.000000
1/21/2011	3:31:13 PM	PHl3 MFC set to  0.000000
1/21/2011	3:31:13 PM	SiCl4 MFC set to  0.000000
1/21/2011	3:31:13 PM	Bypass solenoid MFC set to  0.000000
1/21/2011	3:31:13 PM	Tube furnace set to 0
1/21/2011	3:31:13 PM	Helium valve closed
1/21/2011	3:31:13 PM	H2 valve closed
1/21/2011	3:31:13 PM	BCl3 valve closed
1/21/2011	3:31:13 PM	PH3 valve closed
1/21/2011	3:31:13 PM	SiCl4 pre valve closed
1/21/2011	3:31:13 PM	SiCl4 post valve closed
1/21/2011	3:31:13 PM	Bubbler valve closed
1/21/2011	3:31:13 PM	Main Vac valve opened
1/21/2011	3:31:13 PM	Bypass valve opened
1/21/2011	3:31:13 PM	Helium MFC set to  0.000000
1/21/2011	3:31:13 PM	H2 MFC set to  0.000000
1/21/2011	3:31:13 PM	BCl3 MFC set to  0.000000
1/21/2011	3:31:13 PM	PHl3 MFC set to  0.000000
1/21/2011	3:31:13 PM	SiCl4 MFC set to  0.000000
1/21/2011	3:31:13 PM	Bypass solenoid MFC set to  0.000000
1/21/2011	3:31:14 PM	Tube furnace set to 0
1/21/2011	3:32:14 PM	H2 valve closed
1/21/2011	3:32:14 PM	BCl3 valve closed
1/21/2011	3:32:14 PM	PH3 valve closed
1/21/2011	3:32:14 PM	SiCl4 pre valve closed
1/21/2011	3:32:14 PM	SiCl4 post valve closed
1/21/2011	3:32:14 PM	Bubbler valve closed
1/21/2011	3:32:14 PM	Helium valve opened
1/21/2011	3:32:14 PM	Main Vac valve opened
1/21/2011	3:32:14 PM	Bypass valve opened
1/21/2011	3:32:14 PM	Helium MFC set to  100.000000
1/21/2011	3:32:14 PM	H2 MFC set to  0.000000
1/21/2011	3:32:14 PM	BCl3 MFC set to  0.000000
1/21/2011	3:32:14 PM	PHl3 MFC set to  0.000000
1/21/2011	3:32:14 PM	SiCl4 MFC set to  0.000000
1/21/2011	3:32:14 PM	Bypass solenoid MFC set to  0.000000
1/21/2011	3:32:14 PM	Tube furnace set to 0
1/21/2011	3:33:14 PM	Helium valve closed
1/21/2011	3:33:14 PM	H2 valve closed
1/21/2011	3:33:14 PM	BCl3 valve closed
1/21/2011	3:33:14 PM	PH3 valve closed
1/21/2011	3:33:14 PM	SiCl4 pre valve closed
1/21/2011	3:33:14 PM	SiCl4 post valve closed
1/21/2011	3:33:14 PM	Bubbler valve closed
1/21/2011	3:33:14 PM	Main Vac valve opened
1/21/2011	3:33:14 PM	Bypass valve opened
1/21/2011	3:33:14 PM	Helium MFC set to  0.000000
1/21/2011	3:33:14 PM	H2 MFC set to  0.000000
1/21/2011	3:33:14 PM	BCl3 MFC set to  0.000000
1/21/2011	3:33:14 PM	PHl3 MFC set to  0.000000
1/21/2011	3:33:14 PM	SiCl4 MFC set to  0.000000
1/21/2011	3:33:14 PM	Bypass solenoid MFC set to  0.000000
1/21/2011	3:33:14 PM	Tube furnace set to 0
1/21/2011	3:34:14 PM	H2 valve closed
1/21/2011	3:34:14 PM	BCl3 valve closed
1/21/2011	3:34:14 PM	PH3 valve closed
1/21/2011	3:34:14 PM	SiCl4 pre valve closed
1/21/2011	3:34:14 PM	SiCl4 post valve closed
1/21/2011	3:34:14 PM	Bubbler valve closed
1/21/2011	3:34:14 PM	Helium valve opened
1/21/2011	3:34:14 PM	Main Vac valve opened
1/21/2011	3:34:14 PM	Bypass valve opened
1/21/2011	3:34:14 PM	Helium MFC set to  100.000000
1/21/2011	3:34:14 PM	H2 MFC set to  0.000000
1/21/2011	3:34:14 PM	BCl3 MFC set to  0.000000
1/21/2011	3:34:14 PM	PHl3 MFC set to  0.000000
1/21/2011	3:34:14 PM	SiCl4 MFC set to  0.000000
1/21/2011	3:34:14 PM	Bypass solenoid MFC set to  0.000000
1/21/2011	3:34:14 PM	Tube furnace set to 0
1/21/2011	3:35:14 PM	Helium valve closed
1/21/2011	3:35:14 PM	H2 valve closed
1/21/2011	3:35:14 PM	BCl3 valve closed
1/21/2011	3:35:14 PM	PH3 valve closed
1/21/2011	3:35:14 PM	SiCl4 pre valve closed
1/21/2011	3:35:14 PM	SiCl4 post valve closed
1/21/2011	3:35:14 PM	Bubbler valve closed
1/21/2011	3:35:14 PM	Main Vac valve opened
1/21/2011	3:35:14 PM	Bypass valve opened
1/21/2011	3:35:14 PM	Helium MFC set to  0.000000
1/21/2011	3:35:14 PM	H2 MFC set to  0.000000
1/21/2011	3:35:14 PM	BCl3 MFC set to  0.000000
1/21/2011	3:35:14 PM	PHl3 MFC set to  0.000000
1/21/2011	3:35:14 PM	SiCl4 MFC set to  0.000000
1/21/2011	3:35:14 PM	Bypass solenoid MFC set to  0.000000
1/21/2011	3:35:14 PM	Tube furnace set to 0
1/21/2011	3:36:14 PM	H2 valve closed
1/21/2011	3:36:14 PM	BCl3 valve closed
1/21/2011	3:36:14 PM	PH3 valve closed
1/21/2011	3:36:14 PM	SiCl4 pre valve closed
1/21/2011	3:36:14 PM	SiCl4 post valve closed
1/21/2011	3:36:14 PM	Bubbler valve closed
1/21/2011	3:36:14 PM	Helium valve opened
1/21/2011	3:36:14 PM	Main Vac valve opened
1/21/2011	3:36:14 PM	Bypass valve opened
1/21/2011	3:36:14 PM	Helium MFC set to  100.000000
1/21/2011	3:36:14 PM	H2 MFC set to  0.000000
1/21/2011	3:36:14 PM	BCl3 MFC set to  0.000000
1/21/2011	3:36:15 PM	PHl3 MFC set to  0.000000
1/21/2011	3:36:15 PM	SiCl4 MFC set to  0.000000
1/21/2011	3:36:15 PM	Bypass solenoid MFC set to  0.000000
1/21/2011	3:36:15 PM	Tube furnace set to 0
1/21/2011	3:37:15 PM	Helium valve closed
1/21/2011	3:37:15 PM	H2 valve closed
1/21/2011	3:37:15 PM	BCl3 valve closed
1/21/2011	3:37:15 PM	PH3 valve closed
1/21/2011	3:37:15 PM	SiCl4 pre valve closed
1/21/2011	3:37:15 PM	SiCl4 post valve closed
1/21/2011	3:37:15 PM	Bubbler valve closed
1/21/2011	3:37:15 PM	Main Vac valve opened
1/21/2011	3:37:15 PM	Bypass valve opened
1/21/2011	3:37:15 PM	Helium MFC set to  0.000000
1/21/2011	3:37:15 PM	H2 MFC set to  0.000000
1/21/2011	3:37:15 PM	BCl3 MFC set to  0.000000
1/21/2011	3:37:15 PM	PHl3 MFC set to  0.000000
1/21/2011	3:37:15 PM	SiCl4 MFC set to  0.000000
1/21/2011	3:37:15 PM	Bypass solenoid MFC set to  0.000000
1/21/2011	3:37:15 PM	Tube furnace set to 0
1/21/2011	3:38:15 PM	H2 valve closed
1/21/2011	3:38:15 PM	BCl3 valve closed
1/21/2011	3:38:15 PM	PH3 valve closed
1/21/2011	3:38:15 PM	SiCl4 pre valve closed
1/21/2011	3:38:15 PM	SiCl4 post valve closed
1/21/2011	3:38:15 PM	Bubbler valve closed
1/21/2011	3:38:15 PM	Helium valve opened
1/21/2011	3:38:15 PM	Main Vac valve opened
1/21/2011	3:38:15 PM	Bypass valve opened
1/21/2011	3:38:15 PM	Helium MFC set to  100.000000
1/21/2011	3:38:15 PM	H2 MFC set to  0.000000
1/21/2011	3:38:15 PM	BCl3 MFC set to  0.000000
1/21/2011	3:38:15 PM	PHl3 MFC set to  0.000000
1/21/2011	3:38:15 PM	SiCl4 MFC set to  0.000000
1/21/2011	3:38:15 PM	Bypass solenoid MFC set to  0.000000
1/21/2011	3:38:15 PM	Tube furnace set to 0
1/21/2011	3:39:15 PM	Helium valve closed
1/21/2011	3:39:15 PM	H2 valve closed
1/21/2011	3:39:15 PM	BCl3 valve closed
1/21/2011	3:39:15 PM	PH3 valve closed
1/21/2011	3:39:15 PM	SiCl4 pre valve closed
1/21/2011	3:39:15 PM	SiCl4 post valve closed
1/21/2011	3:39:15 PM	Bubbler valve closed
1/21/2011	3:39:15 PM	Main Vac valve opened
1/21/2011	3:39:15 PM	Bypass valve opened
1/21/2011	3:39:15 PM	Helium MFC set to  0.000000
1/21/2011	3:39:15 PM	H2 MFC set to  0.000000
1/21/2011	3:39:15 PM	BCl3 MFC set to  0.000000
1/21/2011	3:39:15 PM	PHl3 MFC set to  0.000000
1/21/2011	3:39:15 PM	SiCl4 MFC set to  0.000000
1/21/2011	3:39:15 PM	Bypass solenoid MFC set to  0.000000
1/21/2011	3:39:15 PM	Tube furnace set to 0
1/21/2011	3:39:43 PM	Run aborted at 3:39 PM
1/21/2011	3:39:43 PM	Helium valve closed
1/21/2011	3:39:43 PM	H2 valve closed
1/21/2011	3:39:43 PM	BCl3 valve closed
1/21/2011	3:39:43 PM	PH3 valve closed
1/21/2011	3:39:43 PM	SiCl4 pre valve closed
1/21/2011	3:39:43 PM	SiCl4 post valve closed
1/21/2011	3:39:43 PM	Bypass valve closed
1/21/2011	3:39:43 PM	Main Vac valve closed
1/21/2011	3:39:43 PM	Bubbler valve closed
1/21/2011	3:39:43 PM	Helium MFC set to  0.000000
1/21/2011	3:39:43 PM	H2 MFC set to  0.000000
1/21/2011	3:39:43 PM	BCl3 MFC set to  0.000000
1/21/2011	3:39:43 PM	PHl3 MFC set to  0.000000
1/21/2011	3:39:43 PM	SiCl4 MFC set to  0.000000
1/21/2011	3:39:43 PM	Tube furnace set to 0
1/21/2011	3:39:43 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
1/21/2011	3:39:50 PM	Bypass valve opened
1/21/2011	3:39:50 PM	Main Vac valve opened
